Polymer microlens arrays applicable to AllnGaN ultraviolet micro-light-emitting diodes

C.W. Jeon, E. Gu, C. Liu, J.M. Girkin, M.D. Dawson

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

We report on the fabrication of high-optical-quality microlens arrays based on ultraviolet (UV)-curable polymer adhesive. The lenses are suitable, amongst other applications, for high-transmission and projection of the output of UV micropixellated light-emitting diodes. The microlenses were fabricated using a resist-reflow technique with reactive ion etching. An O/sub 2/--CF/sub 4/ etch-gas chemistry, where atomic fluorine eliminates the carbon-related polymer residue at the etch front effectively, resulted in etch rates of 1.4 /spl mu/m per minute for the polymer. Spherical microlenses of root mean square surface roughness 3 nm were obtained.
LanguageEnglish
Pages1887-1889
Number of pages2
JournalIEEE Photonics Technology Letters
Volume17
Issue number9
DOIs
Publication statusPublished - 2005

Fingerprint

Microlenses
Light emitting diodes
Polymers
light emitting diodes
polymers
Fluorine
Reactive ion etching
ultraviolet radiation
adhesives
fluorine
Lenses
Adhesives
surface roughness
Carbon
Gases
Surface roughness
projection
lenses
etching
chemistry

Keywords

  • semiconductors
  • adhesives
  • aluminium compounds
  • gallium compounds
  • indium compounds
  • light emitting diodes microlenses
  • optical arrays
  • optical polymers
  • photonics

Cite this

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abstract = "We report on the fabrication of high-optical-quality microlens arrays based on ultraviolet (UV)-curable polymer adhesive. The lenses are suitable, amongst other applications, for high-transmission and projection of the output of UV micropixellated light-emitting diodes. The microlenses were fabricated using a resist-reflow technique with reactive ion etching. An O/sub 2/--CF/sub 4/ etch-gas chemistry, where atomic fluorine eliminates the carbon-related polymer residue at the etch front effectively, resulted in etch rates of 1.4 /spl mu/m per minute for the polymer. Spherical microlenses of root mean square surface roughness 3 nm were obtained.",
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Polymer microlens arrays applicable to AllnGaN ultraviolet micro-light-emitting diodes. / Jeon, C.W.; Gu, E.; Liu, C.; Girkin, J.M.; Dawson, M.D.

In: IEEE Photonics Technology Letters, Vol. 17, No. 9, 2005, p. 1887-1889.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Polymer microlens arrays applicable to AllnGaN ultraviolet micro-light-emitting diodes

AU - Jeon, C.W.

AU - Gu, E.

AU - Liu, C.

AU - Girkin, J.M.

AU - Dawson, M.D.

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KW - semiconductors

KW - adhesives

KW - aluminium compounds

KW - gallium compounds

KW - indium compounds

KW - light emitting diodes microlenses

KW - optical arrays

KW - optical polymers

KW - photonics

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