We report on the fabrication of high-optical-quality microlens arrays based on ultraviolet (UV)-curable polymer adhesive. The lenses are suitable, amongst other applications, for high-transmission and projection of the output of UV micropixellated light-emitting diodes. The microlenses were fabricated using a resist-reflow technique with reactive ion etching. An O/sub 2/--CF/sub 4/ etch-gas chemistry, where atomic fluorine eliminates the carbon-related polymer residue at the etch front effectively, resulted in etch rates of 1.4 /spl mu/m per minute for the polymer. Spherical microlenses of root mean square surface roughness 3 nm were obtained.
- aluminium compounds
- gallium compounds
- indium compounds
- light emitting diodes microlenses
- optical arrays
- optical polymers
Jeon, C. W., Gu, E., Liu, C., Girkin, J. M., & Dawson, M. D. (2005). Polymer microlens arrays applicable to AllnGaN ultraviolet micro-light-emitting diodes. IEEE Photonics Technology Letters, 17(9), 1887-1889. https://doi.org/10.1109/LPT.2005.851932