Photonic integration of lithium niobate micro-ring resonators onto silicon nitride waveguide chips by transfer-printing

Zhibo Li, Jack A. Smith, Mark Scullion, Nils Kolja Wessling, Loyd J. McKnight, Martin D. Dawson, Michael J. Strain

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Abstract

The heterogeneous integration of pre-fabricated lithium niobate photonic waveguide devices onto a silicon nitride waveguide platform via a transfer-printing approach has been demonstrated for the first time. A fabrication process was developed to make free-standing lithium niobate membrane devices compatible with back-end integration onto photonic integrated circuits. Micro-ring resonators in membrane format were lithographically defined by using laser direct writing and plasma dry etching. The lithium niobate micro-ring resonators were then transferred from their host substrate and released onto a silicon nitride waveguide chip. An all-pass ring resonator transmission spectrum was obtained in the 1.5 µm to 1.6 µm wavelength range, with a measured loaded Q-factor larger than 3.2

Original languageEnglish
Pages (from-to)4375-4383
Number of pages9
JournalOptical Materials Express
Volume12
Issue number11
Early online date19 Oct 2022
DOIs
Publication statusPublished - 1 Nov 2022

Keywords

  • transfer printing
  • micro ring resonators
  • waveguide chips

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