Photoacoustic characterization of custom-made thin film AlN MEMS ultrasound transducers

Jonas Kusch, Gordon M.H. Flockhart, Ralf Bauer, Deepak Uttamchandani

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

2 Citations (Scopus)

47 Downloads (Pure)

1 results
- Title
- Start date(ascending)

Conference on Optical MEMS and Nanophotonics 2018
Bauer, R. (Participant)
29 Jul 2018 → 2 Aug 2018
Activity: Participating in or organising an event types › Participation in conference