Activities per year
Abstract
Two MEMS thin film aluminium nitride ultrasound transducer array designs for photoacoustic sensing applications are presented. They are characterized using the pitch and catch technique and photoacoustic excitation. The results of both approaches are subsequently compared.
Original language | English |
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Title of host publication | 2018 International Conference on Optical MEMS and Nanophotonics (OMN) |
Place of Publication | Piscataway, NJ. |
Publisher | IEEE |
Number of pages | 2 |
ISBN (Electronic) | 9781509063741 |
ISBN (Print) | 9781509063758 |
DOIs | |
Publication status | Published - 6 Sept 2018 |
Event | Conference on Optical MEMS and Nanophotonics 2018 - Ecole Polyechnique Fédérale de Lausanne, Lausanne, Switzerland Duration: 29 Jul 2018 → 2 Aug 2018 https://omn2018.epfl.ch/ |
Conference
Conference | Conference on Optical MEMS and Nanophotonics 2018 |
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Abbreviated title | OMN 2018 |
Country/Territory | Switzerland |
City | Lausanne |
Period | 29/07/18 → 2/08/18 |
Internet address |
Keywords
- ultrasound
- MEMS
- transducer
- characterization
- photoacoustics
Fingerprint
Dive into the research topics of 'Photoacoustic characterization of custom-made thin film AlN MEMS ultrasound transducers'. Together they form a unique fingerprint.Activities
- 1 Participation in conference
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Conference on Optical MEMS and Nanophotonics 2018
Bauer, R. (Participant)
29 Jul 2018 → 2 Aug 2018Activity: Participating in or organising an event types › Participation in conference