Photoacoustic characterization of custom-made thin film AlN MEMS ultrasound transducers

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Abstract

Two MEMS thin film aluminium nitride ultrasound transducer array designs for photoacoustic sensing applications are presented. They are characterized using the pitch and catch technique and photoacoustic excitation. The results of both approaches are subsequently compared.
Original languageEnglish
Title of host publication2018 International Conference on Optical MEMS and Nanophotonics (OMN)
Place of PublicationPiscataway, NJ.
PublisherIEEE
Number of pages2
ISBN (Electronic)9781509063741
ISBN (Print)9781509063758
DOIs
Publication statusPublished - 6 Sep 2018
EventConference on Optical MEMS and Nanophotonics 2018 - Ecole Polyechnique Fédérale de Lausanne, Lausanne, Switzerland
Duration: 29 Jul 20182 Aug 2018
https://omn2018.epfl.ch/

Conference

ConferenceConference on Optical MEMS and Nanophotonics 2018
Abbreviated titleOMN 2018
CountrySwitzerland
CityLausanne
Period29/07/182/08/18
Internet address

Keywords

  • ultrasound
  • MEMS
  • transducer
  • characterization
  • photoacoustics

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