PARAMOD metallization of circuit traces and microvias in photodefined dielectrics: Organic High Density Interconnect Structures (HDIS)

P. H. Kydd, G. A. Jablonski, D. L. Richard, Helena Gleskova

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

Abstract

This paper explores PARAMOD metallization of circuit traces and microvias in photodefined dielectrics.
Original languageEnglish
Title of host publicationOrganic High Density Interconnect Structures (HDIS)
Pages174-180
Number of pages7
Publication statusPublished - 21 Nov 1997

Keywords

  • photodefined dielectrics
  • microvias
  • metallization
  • circuit traces
  • Electrical engineering. Electronics Nuclear engineering
  • Electrical and Electronic Engineering

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