Optimal correction and feedforward control of low-order aberrations with piezoelectric and membrane deformable mirrors

Gleb Vdovin, Oleg Soloviev, Mikhail Loktev, Slava Savenko, Lukasz Dziechciarczyk

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

10 Citations (Scopus)

Abstract

By analysis of the mechanical equations, describing deformable mirrors, we show that the print-through is the natural property of a deformable mirror, which is completely defined by the geometry and mechanics of deformation. The print-through causes increased scattering in imaging applications, and can result in hot/cold spots in laser applications. Further development of adaptive optics for extreme UV applications would also require to address the print-through problem. We describe different ways to reduce, or completely eliminate the print-through in continuous faceplate and membrane deformable mirrors. In combination with simple hysteresis compensation, our approach allows for high-precision feedforward control of these deformable mirrors, directly in terms of Zernike modes.

Original languageEnglish
Title of host publicationUnconventional Imaging, Wavefront Sensing, and Adaptive Coded Aperture Imaging and Non-Imaging Sensor Systems
Subtitle of host publication21-22 and 25 August 2011, San Diego California, United States
Place of PublicationBellingham, WA
DOIs
Publication statusPublished - 13 Sep 2011
Externally publishedYes
EventUnconventional Imaging, Wavefront Sensing, and Adaptive Coded Aperture Imaging and Non-Imaging Sensor Systems - San Diego, CA, United States
Duration: 21 Aug 201125 Aug 2011

Publication series

NameProceedings of SPIE - the International Society for Optical Engineering
PublisherSPIE
Volume8165

Conference

ConferenceUnconventional Imaging, Wavefront Sensing, and Adaptive Coded Aperture Imaging and Non-Imaging Sensor Systems
CountryUnited States
CitySan Diego, CA
Period21/08/1125/08/11

Keywords

  • adaptive optics
  • deformable mirror
  • wavefront correction
  • Zernike polynomials

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