TY - GEN
T1 - Optimal correction and feedforward control of low-order aberrations with piezoelectric and membrane deformable mirrors
AU - Vdovin, Gleb
AU - Soloviev, Oleg
AU - Loktev, Mikhail
AU - Savenko, Slava
AU - Dziechciarczyk, Lukasz
PY - 2011/9/13
Y1 - 2011/9/13
N2 - By analysis of the mechanical equations, describing deformable mirrors, we show that the print-through is the natural property of a deformable mirror, which is completely defined by the geometry and mechanics of deformation. The print-through causes increased scattering in imaging applications, and can result in hot/cold spots in laser applications. Further development of adaptive optics for extreme UV applications would also require to address the print-through problem. We describe different ways to reduce, or completely eliminate the print-through in continuous faceplate and membrane deformable mirrors. In combination with simple hysteresis compensation, our approach allows for high-precision feedforward control of these deformable mirrors, directly in terms of Zernike modes.
AB - By analysis of the mechanical equations, describing deformable mirrors, we show that the print-through is the natural property of a deformable mirror, which is completely defined by the geometry and mechanics of deformation. The print-through causes increased scattering in imaging applications, and can result in hot/cold spots in laser applications. Further development of adaptive optics for extreme UV applications would also require to address the print-through problem. We describe different ways to reduce, or completely eliminate the print-through in continuous faceplate and membrane deformable mirrors. In combination with simple hysteresis compensation, our approach allows for high-precision feedforward control of these deformable mirrors, directly in terms of Zernike modes.
KW - adaptive optics
KW - deformable mirror
KW - wavefront correction
KW - Zernike polynomials
UR - http://www.scopus.com/inward/record.url?scp=80155153027&partnerID=8YFLogxK
U2 - 10.1117/12.893496
DO - 10.1117/12.893496
M3 - Conference contribution book
AN - SCOPUS:80155153027
SN - 9780819487759
T3 - Proceedings of SPIE - the International Society for Optical Engineering
BT - Unconventional Imaging, Wavefront Sensing, and Adaptive Coded Aperture Imaging and Non-Imaging Sensor Systems
CY - Bellingham, WA
T2 - Unconventional Imaging, Wavefront Sensing, and Adaptive Coded Aperture Imaging and Non-Imaging Sensor Systems
Y2 - 21 August 2011 through 25 August 2011
ER -