Optical properties of single crystal diamond microfilms fabricated by ion implantation and lift-off processing

B.R. Patton, P.R. Dolan, F. Grazioso, Matthew B. Wincott, J,M. Smith, M.L. Markham, D.J. Twitchen, Zhang Yanfeng, Erdan Gu, Martin Dawson, B Fairchild, Andrew D. Greentree, S. Prawer

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

We report the fabrication and optical characterisation of ~1 μm thick films of single crystal diamond prepared by an ion implantation and lift-off process. A comparison is made between type 1b material grown by high-temperature high-pressure and high purity type 2a material grown by chemical vapour deposition. Our results show that the fabrication process does not suppress strong emission from nitrogen-vacancy colour centres in the type 1b material. The 1332 cm− 1 Raman line normally prominent in the CVD material is found to be strongly suppressed. A 20 nm thick damaged layer of sp3 carbon is identified on the underside of the films that indicates residual damage from the implantation process. These results are of significance for the fabrication of devices in diamond in which colour centres couple to discrete optical modes.
LanguageEnglish
Pages16-23
Number of pages8
JournalDiamond and Related Materials
Volume21
DOIs
Publication statusPublished - Jan 2012

Fingerprint

microfilms
Microfilm
Diamond
Ion implantation
ion implantation
Diamonds
Optical properties
diamonds
Single crystals
color centers
optical properties
Color centers
fabrication
single crystals
Processing
Fabrication
vapor deposition
Chemical vapor deposition
thick films
implantation

Keywords

  • optics
  • photonics
  • diamond thin films
  • ion implantation

Cite this

Patton, B. R., Dolan, P. R., Grazioso, F., Wincott, M. B., Smith, JM., Markham, M. L., ... Prawer, S. (2012). Optical properties of single crystal diamond microfilms fabricated by ion implantation and lift-off processing. Diamond and Related Materials, 21, 16-23. https://doi.org/10.1016/j.diamond.2011.09.006
Patton, B.R. ; Dolan, P.R. ; Grazioso, F. ; Wincott, Matthew B. ; Smith, J,M. ; Markham, M.L. ; Twitchen, D.J. ; Yanfeng, Zhang ; Gu, Erdan ; Dawson, Martin ; Fairchild, B ; Greentree, Andrew D. ; Prawer, S. . / Optical properties of single crystal diamond microfilms fabricated by ion implantation and lift-off processing. In: Diamond and Related Materials. 2012 ; Vol. 21. pp. 16-23.
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Patton, BR, Dolan, PR, Grazioso, F, Wincott, MB, Smith, JM, Markham, ML, Twitchen, DJ, Yanfeng, Z, Gu, E, Dawson, M, Fairchild, B, Greentree, AD & Prawer, S 2012, 'Optical properties of single crystal diamond microfilms fabricated by ion implantation and lift-off processing' Diamond and Related Materials, vol. 21, pp. 16-23. https://doi.org/10.1016/j.diamond.2011.09.006

Optical properties of single crystal diamond microfilms fabricated by ion implantation and lift-off processing. / Patton, B.R.; Dolan, P.R.; Grazioso, F.; Wincott, Matthew B.; Smith, J,M.; Markham, M.L.; Twitchen, D.J.; Yanfeng, Zhang; Gu, Erdan; Dawson, Martin; Fairchild, B; Greentree, Andrew D.; Prawer, S. .

In: Diamond and Related Materials, Vol. 21, 01.2012, p. 16-23.

Research output: Contribution to journalArticle

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T1 - Optical properties of single crystal diamond microfilms fabricated by ion implantation and lift-off processing

AU - Patton, B.R.

AU - Dolan, P.R.

AU - Grazioso, F.

AU - Wincott, Matthew B.

AU - Smith, J,M.

AU - Markham, M.L.

AU - Twitchen, D.J.

AU - Yanfeng, Zhang

AU - Gu, Erdan

AU - Dawson, Martin

AU - Fairchild, B

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AU - Prawer, S.

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