Optical properties of Si nanocrystals prepared by magnetron sputtering

V. G. Baru, A. P. Chernushich, V. A. Luzanov, G. V. Stepanov, L. Yu Zakharov, K. P. O'Donnell, I. V. Bradley, N. N. Melnik, P. N. Lebedev

Research output: Contribution to journalArticle

27 Citations (Scopus)

Abstract

Visible photoluminescence (PL), optical transmission, and Raman scattering spectra of Si nanocrystals embedded in SiO2 matrix have been studied. Films were deposited by rf magnetron sputtering of compound SiO2/Si targets. Films containing silicon in the form of nanocrystals clusters show intense luminescence at room temperature. Films containing only amorphous Si clusters show little or no PL. Annealing in vacuum or in specific atmosphere leads to strong change of the PL spectrum and its intensity. Results are explained by strong influence of the Si/SiO2 interface state on integral PL emission.

LanguageEnglish
Pages4148-4150
Number of pages3
JournalApplied Physics Letters
Volume69
Issue number27
DOIs
Publication statusPublished - 30 Dec 1996

Fingerprint

magnetron sputtering
nanocrystals
photoluminescence
optical properties
silicon films
luminescence
Raman spectra
atmospheres
vacuum
annealing
room temperature
matrices

Keywords

  • photoluminescence
  • optical transmission
  • silicon nanocrystals

Cite this

Baru, V. G., Chernushich, A. P., Luzanov, V. A., Stepanov, G. V., Zakharov, L. Y., O'Donnell, K. P., ... Lebedev, P. N. (1996). Optical properties of Si nanocrystals prepared by magnetron sputtering. Applied Physics Letters, 69(27), 4148-4150. https://doi.org/10.1063/1.116967
Baru, V. G. ; Chernushich, A. P. ; Luzanov, V. A. ; Stepanov, G. V. ; Zakharov, L. Yu ; O'Donnell, K. P. ; Bradley, I. V. ; Melnik, N. N. ; Lebedev, P. N. / Optical properties of Si nanocrystals prepared by magnetron sputtering. In: Applied Physics Letters. 1996 ; Vol. 69, No. 27. pp. 4148-4150.
@article{b94ad48aa60a4cd2a67304236cddff26,
title = "Optical properties of Si nanocrystals prepared by magnetron sputtering",
abstract = "Visible photoluminescence (PL), optical transmission, and Raman scattering spectra of Si nanocrystals embedded in SiO2 matrix have been studied. Films were deposited by rf magnetron sputtering of compound SiO2/Si targets. Films containing silicon in the form of nanocrystals clusters show intense luminescence at room temperature. Films containing only amorphous Si clusters show little or no PL. Annealing in vacuum or in specific atmosphere leads to strong change of the PL spectrum and its intensity. Results are explained by strong influence of the Si/SiO2 interface state on integral PL emission.",
keywords = "photoluminescence, optical transmission, silicon nanocrystals",
author = "Baru, {V. G.} and Chernushich, {A. P.} and Luzanov, {V. A.} and Stepanov, {G. V.} and Zakharov, {L. Yu} and O'Donnell, {K. P.} and Bradley, {I. V.} and Melnik, {N. N.} and Lebedev, {P. N.}",
year = "1996",
month = "12",
day = "30",
doi = "10.1063/1.116967",
language = "English",
volume = "69",
pages = "4148--4150",
journal = "Applied Physics Letters",
issn = "0003-6951",
number = "27",

}

Baru, VG, Chernushich, AP, Luzanov, VA, Stepanov, GV, Zakharov, LY, O'Donnell, KP, Bradley, IV, Melnik, NN & Lebedev, PN 1996, 'Optical properties of Si nanocrystals prepared by magnetron sputtering' Applied Physics Letters, vol. 69, no. 27, pp. 4148-4150. https://doi.org/10.1063/1.116967

Optical properties of Si nanocrystals prepared by magnetron sputtering. / Baru, V. G.; Chernushich, A. P.; Luzanov, V. A.; Stepanov, G. V.; Zakharov, L. Yu; O'Donnell, K. P.; Bradley, I. V.; Melnik, N. N.; Lebedev, P. N.

In: Applied Physics Letters, Vol. 69, No. 27, 30.12.1996, p. 4148-4150.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Optical properties of Si nanocrystals prepared by magnetron sputtering

AU - Baru, V. G.

AU - Chernushich, A. P.

AU - Luzanov, V. A.

AU - Stepanov, G. V.

AU - Zakharov, L. Yu

AU - O'Donnell, K. P.

AU - Bradley, I. V.

AU - Melnik, N. N.

AU - Lebedev, P. N.

PY - 1996/12/30

Y1 - 1996/12/30

N2 - Visible photoluminescence (PL), optical transmission, and Raman scattering spectra of Si nanocrystals embedded in SiO2 matrix have been studied. Films were deposited by rf magnetron sputtering of compound SiO2/Si targets. Films containing silicon in the form of nanocrystals clusters show intense luminescence at room temperature. Films containing only amorphous Si clusters show little or no PL. Annealing in vacuum or in specific atmosphere leads to strong change of the PL spectrum and its intensity. Results are explained by strong influence of the Si/SiO2 interface state on integral PL emission.

AB - Visible photoluminescence (PL), optical transmission, and Raman scattering spectra of Si nanocrystals embedded in SiO2 matrix have been studied. Films were deposited by rf magnetron sputtering of compound SiO2/Si targets. Films containing silicon in the form of nanocrystals clusters show intense luminescence at room temperature. Films containing only amorphous Si clusters show little or no PL. Annealing in vacuum or in specific atmosphere leads to strong change of the PL spectrum and its intensity. Results are explained by strong influence of the Si/SiO2 interface state on integral PL emission.

KW - photoluminescence

KW - optical transmission

KW - silicon nanocrystals

UR - http://www.scopus.com/inward/record.url?scp=0030411058&partnerID=8YFLogxK

U2 - 10.1063/1.116967

DO - 10.1063/1.116967

M3 - Article

VL - 69

SP - 4148

EP - 4150

JO - Applied Physics Letters

T2 - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 27

ER -

Baru VG, Chernushich AP, Luzanov VA, Stepanov GV, Zakharov LY, O'Donnell KP et al. Optical properties of Si nanocrystals prepared by magnetron sputtering. Applied Physics Letters. 1996 Dec 30;69(27):4148-4150. https://doi.org/10.1063/1.116967