Optical properties of RTCVD polycrystalline thin films

Marco Marazzi, Mario Giardini, Alessandro Borghesi, Adele Sassella, M. Alessandri, G. Ferroni

Research output: Contribution to conference › Abstract › peer-review

Original language	English
Publication status	Published - 1996
Event	E-MRS Spring Meeting 1996 - Strasbourg, France Duration: 3 Jun 1996 → 7 Jun 1996

Keywords

@conference{b48363f8827e4c91b814b69cf93b9b32,

title = "Optical properties of RTCVD polycrystalline thin films",

keywords = "optical properties, thin films, polycrystalline, rapid thermal chemical vapour deposition",

author = "Marco Marazzi and Mario Giardini and Alessandro Borghesi and Adele Sassella and M. Alessandri and G. Ferroni",

year = "1996",

language = "English",

note = "E-MRS Spring Meeting 1996 ; Conference date: 03-06-1996 Through 07-06-1996",

}

TY - CONF

T1 - Optical properties of RTCVD polycrystalline thin films

AU - Marazzi, Marco

AU - Giardini, Mario

AU - Borghesi, Alessandro

AU - Sassella, Adele

AU - Alessandri, M.

AU - Ferroni, G.

PY - 1996

Y1 - 1996

KW - optical properties

KW - thin films

KW - polycrystalline

KW - rapid thermal chemical vapour deposition

UR - http://www.european-mrs.com/about/history

M3 - Abstract

T2 - E-MRS Spring Meeting 1996

Y2 - 3 June 1996 through 7 June 1996

ER -