Optical MEMS using commercial foundries

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

This chapter explores optical MEMS using commercial foundries
LanguageEnglish
Title of host publicationGuided wave optical components and devices
Subtitle of host publicationbasics, technology and applications
EditorsBishnu P. Pal
Pages353-369
Number of pages17
Publication statusPublished - 2005

Fingerprint

MOEMS
Foundries

Keywords

  • optical mems
  • commercial foundries
  • fabrication
  • experimental
  • design

Cite this

Uttamchandani, D. G. (2005). Optical MEMS using commercial foundries. In B. P. Pal (Ed.), Guided wave optical components and devices: basics, technology and applications (pp. 353-369)
Uttamchandani, D.G. / Optical MEMS using commercial foundries. Guided wave optical components and devices: basics, technology and applications . editor / Bishnu P. Pal. 2005. pp. 353-369
@inbook{124f36fe35224a15bea37446b1ee80d4,
title = "Optical MEMS using commercial foundries",
abstract = "This chapter explores optical MEMS using commercial foundries",
keywords = "optical mems, commercial foundries, fabrication, experimental, design",
author = "D.G. Uttamchandani",
year = "2005",
language = "English",
isbn = "9780120884810",
pages = "353--369",
editor = "Pal, {Bishnu P. }",
booktitle = "Guided wave optical components and devices",

}

Uttamchandani, DG 2005, Optical MEMS using commercial foundries. in BP Pal (ed.), Guided wave optical components and devices: basics, technology and applications . pp. 353-369.

Optical MEMS using commercial foundries. / Uttamchandani, D.G.

Guided wave optical components and devices: basics, technology and applications . ed. / Bishnu P. Pal. 2005. p. 353-369.

Research output: Chapter in Book/Report/Conference proceedingChapter

TY - CHAP

T1 - Optical MEMS using commercial foundries

AU - Uttamchandani, D.G.

PY - 2005

Y1 - 2005

N2 - This chapter explores optical MEMS using commercial foundries

AB - This chapter explores optical MEMS using commercial foundries

KW - optical mems

KW - commercial foundries

KW - fabrication

KW - experimental

KW - design

M3 - Chapter

SN - 9780120884810

SP - 353

EP - 369

BT - Guided wave optical components and devices

A2 - Pal, Bishnu P.

ER -

Uttamchandani DG. Optical MEMS using commercial foundries. In Pal BP, editor, Guided wave optical components and devices: basics, technology and applications . 2005. p. 353-369