Optical MEMS using commercial foundries

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Abstract

This chapter explores optical MEMS using commercial foundries

Original language	English
Title of host publication	Guided wave optical components and devices
Subtitle of host publication	basics, technology and applications
Editors	Bishnu P. Pal
Pages	353-369
Number of pages	17
Publication status	Published - 2005

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title = "Optical MEMS using commercial foundries",

abstract = "This chapter explores optical MEMS using commercial foundries",

keywords = "optical mems, commercial foundries, fabrication, experimental, design",

author = "D.G. Uttamchandani",

year = "2005",

language = "English",

isbn = "9780120884810",

pages = "353--369",

editor = "Pal, {Bishnu P. }",

booktitle = "Guided wave optical components and devices",

}

TY - CHAP

T1 - Optical MEMS using commercial foundries

AU - Uttamchandani, D.G.

PY - 2005

Y1 - 2005

N2 - This chapter explores optical MEMS using commercial foundries

AB - This chapter explores optical MEMS using commercial foundries

KW - optical mems

KW - commercial foundries

KW - fabrication

KW - experimental

KW - design

M3 - Chapter

SN - 9780120884810

SP - 353

EP - 369

BT - Guided wave optical components and devices

A2 - Pal, Bishnu P.

ER -