Optical MEMS using commercial foundries

Research output: Chapter in Book/Report/Conference proceedingChapter


This chapter explores optical MEMS using commercial foundries
Original languageEnglish
Title of host publicationGuided wave optical components and devices
Subtitle of host publicationbasics, technology and applications
EditorsBishnu P. Pal
Number of pages17
Publication statusPublished - 2005


  • optical mems
  • commercial foundries
  • fabrication
  • experimental
  • design

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    Uttamchandani, D. G. (2005). Optical MEMS using commercial foundries. In B. P. Pal (Ed.), Guided wave optical components and devices: basics, technology and applications (pp. 353-369)