Optical MEMS using commercial foundries

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

This chapter explores optical MEMS using commercial foundries
Original languageEnglish
Title of host publicationGuided wave optical components and devices
Subtitle of host publicationbasics, technology and applications
EditorsBishnu P. Pal
Pages353-369
Number of pages17
Publication statusPublished - 2005

Keywords

  • optical mems
  • commercial foundries
  • fabrication
  • experimental
  • design

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  • Cite this

    Uttamchandani, D. G. (2005). Optical MEMS using commercial foundries. In B. P. Pal (Ed.), Guided wave optical components and devices: basics, technology and applications (pp. 353-369)