Optical fibre aligner using deep-etched silicon electrothermal actuator

R. Syms, H. Zou, J. Stagg, J. Yao, D.G. Uttamchandani

Research output: Contribution to conferencePaper

Abstract

A MEMS based in-plane fibre optic alignment device based on a scalable folded buckling mode electro-thermal microactuator has been developed. The bi-directional fibre alignment device, for use with standard single mode optical fibres, is formed from two opposed microactuators, and includes an etched channel with microsprings for fibre retention. The device is fabricated by deep reactive ion etching (DRIE) of bonded silicon-on-insulator. The optical/electrical/mechanical characteristics of the MEMS fibre aligner have been measured. The drive efficiency of the actuator peaks at around 6μm/Watt, whilst when configuring the device as a single mode fibre variable optical attenuator the fibre-to-fibre attenuation of the device is 24dB before failure.
Original languageEnglish
Pages84-85
Number of pages2
Publication statusPublished - Aug 2004
EventIEEE/LEOS Optical MEMS International Conference on optical MEMS and their applications - Kagawa, Japan
Duration: 22 Aug 200426 Aug 2004

Conference

ConferenceIEEE/LEOS Optical MEMS International Conference on optical MEMS and their applications
CountryJapan
CityKagawa
Period22/08/0426/08/04

Keywords

  • Microelectromechanical systems
  • optical fibre alignment
  • variable optical attenuator
  • buckling microactuator
  • micro-opto-electromechanical systems
  • MEMS
  • VOA
  • MOEMS

Cite this

Syms, R., Zou, H., Stagg, J., Yao, J., & Uttamchandani, D. G. (2004). Optical fibre aligner using deep-etched silicon electrothermal actuator. 84-85. Paper presented at IEEE/LEOS Optical MEMS International Conference on optical MEMS and their applications, Kagawa, Japan.