TY - JOUR
T1 - On-machine focus variation measurement for micro-scale hybrid surface texture machining
AU - Santoso, Teguh
AU - Syam, Wahyudin P.
AU - Darukumalli, Subbareddy
AU - Cai, Yukui
AU - Helmli, Franz
AU - Luo, Xichun
AU - Leach, Richard
PY - 2020/8/1
Y1 - 2020/8/1
N2 - Fast and accurate in-line areal surface topography measuring instruments are required to control the quality of microscale manufactured components, without significantly slowing down the production process. Full-field areal optical surface topography measurement instruments are promising for in-line or on-machine measurement applications due to their ability to measure quickly, to access small features and to avoid surface damage. This paper presents the development and integration of a compact optical focus variation sensor for on-machine surface topography measurement mounted on to a hybrid ultraprecision machine tool. The sensor development is described and a case study involving the on-machine dimensional measurement of the depth of hydrophobic microscale features, including microchannels and micro-dimples, is presented. Comparisons of results between the on-machine measurements obtained by the developed sensor and a desktop focus variation microscope are presented and discussed. The comparison results show that the developed focus variation sensor is able to perform on-machine dimensional measurement of microscale features within sub-micrometre accuracy.
AB - Fast and accurate in-line areal surface topography measuring instruments are required to control the quality of microscale manufactured components, without significantly slowing down the production process. Full-field areal optical surface topography measurement instruments are promising for in-line or on-machine measurement applications due to their ability to measure quickly, to access small features and to avoid surface damage. This paper presents the development and integration of a compact optical focus variation sensor for on-machine surface topography measurement mounted on to a hybrid ultraprecision machine tool. The sensor development is described and a case study involving the on-machine dimensional measurement of the depth of hydrophobic microscale features, including microchannels and micro-dimples, is presented. Comparisons of results between the on-machine measurements obtained by the developed sensor and a desktop focus variation microscope are presented and discussed. The comparison results show that the developed focus variation sensor is able to perform on-machine dimensional measurement of microscale features within sub-micrometre accuracy.
KW - focus variation
KW - motion stage
KW - on-machine measurement
KW - precision engineering
KW - surface texture
UR - http://www.scopus.com/inward/record.url?scp=85088784300&partnerID=8YFLogxK
U2 - 10.1007/s00170-020-05767-z
DO - 10.1007/s00170-020-05767-z
M3 - Article
AN - SCOPUS:85088784300
VL - 109
SP - 2353
EP - 2364
JO - The International Journal of Advanced Manufacturing Technology
JF - The International Journal of Advanced Manufacturing Technology
SN - 0268-3768
IS - 9-12
ER -