On-machine focus variation measurement for micro-scale hybrid surface texture machining

Teguh Santoso; Wahyudin P. Syam; Subbareddy Darukumalli; Yukui Cai; Franz Helmli; Xichun Luo; Richard Leach

doi:10.1007/s00170-020-05767-z

On-machine focus variation measurement for micro-scale hybrid surface texture machining

Teguh Santoso^*, Wahyudin P. Syam, Subbareddy Darukumalli, Yukui Cai, Franz Helmli, Xichun Luo, Richard Leach

^*Corresponding author for this work

Design, Manufacturing And Engineering Management

Research output: Contribution to journal › Article › peer-review

15 Citations (Scopus)

20 Downloads (Pure)

Abstract

Fast and accurate in-line areal surface topography measuring instruments are required to control the quality of microscale manufactured components, without significantly slowing down the production process. Full-field areal optical surface topography measurement instruments are promising for in-line or on-machine measurement applications due to their ability to measure quickly, to access small features and to avoid surface damage. This paper presents the development and integration of a compact optical focus variation sensor for on-machine surface topography measurement mounted on to a hybrid ultraprecision machine tool. The sensor development is described and a case study involving the on-machine dimensional measurement of the depth of hydrophobic microscale features, including microchannels and micro-dimples, is presented. Comparisons of results between the on-machine measurements obtained by the developed sensor and a desktop focus variation microscope are presented and discussed. The comparison results show that the developed focus variation sensor is able to perform on-machine dimensional measurement of microscale features within sub-micrometre accuracy.

Original language	English
Pages (from-to)	2353-2364
Number of pages	12
Journal	The International Journal of Advanced Manufacturing Technology
Volume	109
Issue number	9-12
Early online date	30 Jul 2020
DOIs	https://doi.org/10.1007/s00170-020-05767-z
Publication status	Published - 1 Aug 2020

Funding

This research work was undertaken in the context of MICROMAN project (“Process Fingerprint for Zero-defect Net-shape MICROMANufacturing”, www.microman.mek.dtu.dk/ ). MICROMAN is a European Training Network supported by Horizon 2020, the EU Framework Programme for Research and Innovation (Project ID:674801), and by the H2020-MSCA-ITN-2016 project PAM2 (Precision Additive Metal Manufacturing), EU Framework Programme for Research and Innovation H2020 – Grant Agreement No 721383. This work was also supported by the Engineering and Physical Sciences Research Council [grant number EP/M008983/1].

Keywords

focus variation
motion stage
on-machine measurement
precision engineering
surface texture

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10.1007/s00170-020-05767-z

Santoso-etal-IJAMT-2020-On-machine-focus-variation-measurement-for-micro-scaleFinal published version, 7.58 MBLicence: CC BY 4.0

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title = "On-machine focus variation measurement for micro-scale hybrid surface texture machining",

abstract = "Fast and accurate in-line areal surface topography measuring instruments are required to control the quality of microscale manufactured components, without significantly slowing down the production process. Full-field areal optical surface topography measurement instruments are promising for in-line or on-machine measurement applications due to their ability to measure quickly, to access small features and to avoid surface damage. This paper presents the development and integration of a compact optical focus variation sensor for on-machine surface topography measurement mounted on to a hybrid ultraprecision machine tool. The sensor development is described and a case study involving the on-machine dimensional measurement of the depth of hydrophobic microscale features, including microchannels and micro-dimples, is presented. Comparisons of results between the on-machine measurements obtained by the developed sensor and a desktop focus variation microscope are presented and discussed. The comparison results show that the developed focus variation sensor is able to perform on-machine dimensional measurement of microscale features within sub-micrometre accuracy.",

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AU - Santoso, Teguh

AU - Syam, Wahyudin P.

AU - Darukumalli, Subbareddy

AU - Cai, Yukui

AU - Helmli, Franz

AU - Luo, Xichun

AU - Leach, Richard

PY - 2020/8/1

Y1 - 2020/8/1

N2 - Fast and accurate in-line areal surface topography measuring instruments are required to control the quality of microscale manufactured components, without significantly slowing down the production process. Full-field areal optical surface topography measurement instruments are promising for in-line or on-machine measurement applications due to their ability to measure quickly, to access small features and to avoid surface damage. This paper presents the development and integration of a compact optical focus variation sensor for on-machine surface topography measurement mounted on to a hybrid ultraprecision machine tool. The sensor development is described and a case study involving the on-machine dimensional measurement of the depth of hydrophobic microscale features, including microchannels and micro-dimples, is presented. Comparisons of results between the on-machine measurements obtained by the developed sensor and a desktop focus variation microscope are presented and discussed. The comparison results show that the developed focus variation sensor is able to perform on-machine dimensional measurement of microscale features within sub-micrometre accuracy.

AB - Fast and accurate in-line areal surface topography measuring instruments are required to control the quality of microscale manufactured components, without significantly slowing down the production process. Full-field areal optical surface topography measurement instruments are promising for in-line or on-machine measurement applications due to their ability to measure quickly, to access small features and to avoid surface damage. This paper presents the development and integration of a compact optical focus variation sensor for on-machine surface topography measurement mounted on to a hybrid ultraprecision machine tool. The sensor development is described and a case study involving the on-machine dimensional measurement of the depth of hydrophobic microscale features, including microchannels and micro-dimples, is presented. Comparisons of results between the on-machine measurements obtained by the developed sensor and a desktop focus variation microscope are presented and discussed. The comparison results show that the developed focus variation sensor is able to perform on-machine dimensional measurement of microscale features within sub-micrometre accuracy.

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On-machine focus variation measurement for micro-scale hybrid surface texture machining

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