On interaction of RF plasmas and amorphous silicon

E. Pincik, K. Gmucova, M. Jergel, J. Mullerova, H. Gleskova, V. Nadazdy, R. A. C. M. M. van Swaaij, R. Durny, R. Brunner, M. Zeman, M. Kucera , L. Ortega, M. Zahoran

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

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