On interaction of RF plasmas and amorphous silicon

E.  Pincik; K. Gmucova; M.  Jergel; J. Mullerova; H. Gleskova; V. Nadazdy; R. A. C. M. M. van Swaaij; R. Durny; R. Brunner; M. Zeman; M.  Kucera; L.  Ortega; M.  Zahoran

On interaction of RF plasmas and amorphous silicon

E. Pincik, K. Gmucova, M. Jergel, J. Mullerova, H. Gleskova, V. Nadazdy, R. A. C. M. M. van Swaaij, R. Durny, R. Brunner, M. Zeman, M. Kucera , L. Ortega, M. Zahoran

Electronic And Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

Abstract

A chapter on interaction of RF plasmas and amorphous silicon

Original language	English
Title of host publication	Proceedings of the 8th international workshop on applied physics of condensed matter
Editors	J. Mudron, J. Mullerova, P. Sutta, L. Harmatha
Pages	214-215
Number of pages	2
Publication status	Published - 2002
Event	8th International workshop on applied physics of condensed matter - Liptovsky Mikulas, Demanovska Dolina, Slovakia Duration: 19 Jun 2002 → 22 Jun 2002

Conference

Conference	8th International workshop on applied physics of condensed matter
Country/Territory	Slovakia
City	Liptovsky Mikulas, Demanovska Dolina,
Period	19/06/02 → 22/06/02

Keywords

interaction
rf plasmas
amorphous silicon

Cite this

Pincik, E., Gmucova, K., Jergel, M., Mullerova, J., Gleskova, H., Nadazdy, V., van Swaaij, R. A. C. M. M., Durny, R., Brunner, R., Zeman, M., Kucera , M., Ortega, L., & Zahoran, M. (2002). On interaction of RF plasmas and amorphous silicon. In J. Mudron, J. Mullerova, P. Sutta, & L. Harmatha (Eds.), Proceedings of the 8th international workshop on applied physics of condensed matter (pp. 214-215)

@inproceedings{a325a538668c42f5bd81ef0daf8676cb,

title = "On interaction of RF plasmas and amorphous silicon",

abstract = "A chapter on interaction of RF plasmas and amorphous silicon",

keywords = "interaction, rf plasmas, amorphous silicon",

author = "E. Pincik and K. Gmucova and M. Jergel and J. Mullerova and H. Gleskova and V. Nadazdy and \{van Swaaij\}, \{R. A. C. M. M.\} and R. Durny and R. Brunner and M. Zeman and M. Kucera and L. Ortega and M. Zahoran",

year = "2002",

language = "English",

isbn = "8080401861",

pages = "214--215",

editor = "Mudron, \{J. \} and Mullerova, \{J. \} and Sutta, \{P. \} and Harmatha, \{L. \}",

booktitle = "Proceedings of the 8th international workshop on applied physics of condensed matter",

note = "8th International workshop on applied physics of condensed matter ; Conference date: 19-06-2002 Through 22-06-2002",

}

Pincik, E, Gmucova, K, Jergel, M, Mullerova, J, Gleskova, H, Nadazdy, V, van Swaaij, RACMM, Durny, R, Brunner, R, Zeman, M, Kucera , M, Ortega, L & Zahoran, M 2002, On interaction of RF plasmas and amorphous silicon. in J Mudron, J Mullerova, P Sutta & L Harmatha (eds), Proceedings of the 8th international workshop on applied physics of condensed matter. pp. 214-215, 8th International workshop on applied physics of condensed matter, Liptovsky Mikulas, Demanovska Dolina, Slovakia, 19/06/02.

TY - GEN

T1 - On interaction of RF plasmas and amorphous silicon

AU - Pincik, E.

AU - Gmucova, K.

AU - Jergel, M.

AU - Mullerova, J.

AU - Gleskova, H.

AU - Nadazdy, V.

AU - van Swaaij, R. A. C. M. M.

AU - Durny, R.

AU - Brunner, R.

AU - Zeman, M.

AU - Kucera , M.

AU - Ortega, L.

AU - Zahoran, M.

PY - 2002

Y1 - 2002

N2 - A chapter on interaction of RF plasmas and amorphous silicon

AB - A chapter on interaction of RF plasmas and amorphous silicon

KW - interaction

KW - rf plasmas

KW - amorphous silicon

M3 - Conference contribution book

SN - 8080401861

SP - 214

EP - 215

BT - Proceedings of the 8th international workshop on applied physics of condensed matter

A2 - Mudron, J.

A2 - Mullerova, J.

A2 - Sutta, P.

A2 - Harmatha, L.

T2 - 8th International workshop on applied physics of condensed matter

Y2 - 19 June 2002 through 22 June 2002

ER -

On interaction of RF plasmas and amorphous silicon

Abstract

Conference

Keywords

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