On interaction of RF plasmas and amorphous silicon

E. Pincik, K. Gmucova, M. Jergel, J. Mullerova, H. Gleskova, V. Nadazdy, R. A. C. M. M. van Swaaij, R. Durny, R. Brunner, M. Zeman, M. Kucera , L. Ortega, M. Zahoran

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

Abstract

A chapter on interaction of RF plasmas and amorphous silicon
LanguageEnglish
Title of host publicationProceedings of the 8th international workshop on applied physics of condensed matter
EditorsJ. Mudron, J. Mullerova, P. Sutta, L. Harmatha
Pages214-215
Number of pages2
Publication statusPublished - 2002
Event8th International workshop on applied physics of condensed matter - Liptovsky Mikulas, Demanovska Dolina, Slovakia
Duration: 19 Jun 200222 Jun 2002

Conference

Conference8th International workshop on applied physics of condensed matter
CountrySlovakia
CityLiptovsky Mikulas, Demanovska Dolina,
Period19/06/0222/06/02

Fingerprint

amorphous silicon
silicon
interactions

Keywords

  • interaction
  • rf plasmas
  • amorphous silicon

Cite this

Pincik, E., Gmucova, K., Jergel, M., Mullerova, J., Gleskova, H., Nadazdy, V., ... Zahoran, M. (2002). On interaction of RF plasmas and amorphous silicon. In J. Mudron, J. Mullerova, P. Sutta, & L. Harmatha (Eds.), Proceedings of the 8th international workshop on applied physics of condensed matter (pp. 214-215)
Pincik, E. ; Gmucova, K. ; Jergel, M. ; Mullerova, J. ; Gleskova, H. ; Nadazdy, V. ; van Swaaij, R. A. C. M. M. ; Durny, R. ; Brunner, R. ; Zeman, M. ; Kucera , M. ; Ortega, L. ; Zahoran, M. . / On interaction of RF plasmas and amorphous silicon. Proceedings of the 8th international workshop on applied physics of condensed matter. editor / J. Mudron ; J. Mullerova ; P. Sutta ; L. Harmatha. 2002. pp. 214-215
@inproceedings{a325a538668c42f5bd81ef0daf8676cb,
title = "On interaction of RF plasmas and amorphous silicon",
abstract = "A chapter on interaction of RF plasmas and amorphous silicon",
keywords = "interaction, rf plasmas, amorphous silicon",
author = "E. Pincik and K. Gmucova and M. Jergel and J. Mullerova and H. Gleskova and V. Nadazdy and {van Swaaij}, {R. A. C. M. M.} and R. Durny and R. Brunner and M. Zeman and M. Kucera and L. Ortega and M. Zahoran",
year = "2002",
language = "English",
isbn = "8080401861",
pages = "214--215",
editor = "Mudron, {J. } and Mullerova, {J. } and Sutta, {P. } and Harmatha, {L. }",
booktitle = "Proceedings of the 8th international workshop on applied physics of condensed matter",

}

Pincik, E, Gmucova, K, Jergel, M, Mullerova, J, Gleskova, H, Nadazdy, V, van Swaaij, RACMM, Durny, R, Brunner, R, Zeman, M, Kucera , M, Ortega, L & Zahoran, M 2002, On interaction of RF plasmas and amorphous silicon. in J Mudron, J Mullerova, P Sutta & L Harmatha (eds), Proceedings of the 8th international workshop on applied physics of condensed matter. pp. 214-215, 8th International workshop on applied physics of condensed matter, Liptovsky Mikulas, Demanovska Dolina, Slovakia, 19/06/02.

On interaction of RF plasmas and amorphous silicon. / Pincik, E. ; Gmucova, K.; Jergel, M. ; Mullerova, J.; Gleskova, H.; Nadazdy, V.; van Swaaij, R. A. C. M. M.; Durny, R.; Brunner, R.; Zeman, M.; Kucera , M. ; Ortega, L. ; Zahoran, M. .

Proceedings of the 8th international workshop on applied physics of condensed matter. ed. / J. Mudron; J. Mullerova; P. Sutta; L. Harmatha. 2002. p. 214-215.

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

TY - GEN

T1 - On interaction of RF plasmas and amorphous silicon

AU - Pincik, E.

AU - Gmucova, K.

AU - Jergel, M.

AU - Mullerova, J.

AU - Gleskova, H.

AU - Nadazdy, V.

AU - van Swaaij, R. A. C. M. M.

AU - Durny, R.

AU - Brunner, R.

AU - Zeman, M.

AU - Kucera , M.

AU - Ortega, L.

AU - Zahoran, M.

PY - 2002

Y1 - 2002

N2 - A chapter on interaction of RF plasmas and amorphous silicon

AB - A chapter on interaction of RF plasmas and amorphous silicon

KW - interaction

KW - rf plasmas

KW - amorphous silicon

M3 - Conference contribution book

SN - 8080401861

SP - 214

EP - 215

BT - Proceedings of the 8th international workshop on applied physics of condensed matter

A2 - Mudron, J.

A2 - Mullerova, J.

A2 - Sutta, P.

A2 - Harmatha, L.

ER -

Pincik E, Gmucova K, Jergel M, Mullerova J, Gleskova H, Nadazdy V et al. On interaction of RF plasmas and amorphous silicon. In Mudron J, Mullerova J, Sutta P, Harmatha L, editors, Proceedings of the 8th international workshop on applied physics of condensed matter. 2002. p. 214-215