On interaction of RF plasmas and amorphous silicon

E. Pincik, K. Gmucova, M. Jergel, J. Mullerova, H. Gleskova, V. Nadazdy, R. A. C. M. M. van Swaaij, R. Durny, R. Brunner, M. Zeman, M. Kucera , L. Ortega, M. Zahoran

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

Abstract

A chapter on interaction of RF plasmas and amorphous silicon
Original languageEnglish
Title of host publicationProceedings of the 8th international workshop on applied physics of condensed matter
EditorsJ. Mudron, J. Mullerova, P. Sutta, L. Harmatha
Pages214-215
Number of pages2
Publication statusPublished - 2002
Event8th International workshop on applied physics of condensed matter - Liptovsky Mikulas, Demanovska Dolina, Slovakia
Duration: 19 Jun 200222 Jun 2002

Conference

Conference8th International workshop on applied physics of condensed matter
CountrySlovakia
CityLiptovsky Mikulas, Demanovska Dolina,
Period19/06/0222/06/02

Keywords

  • interaction
  • rf plasmas
  • amorphous silicon

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