Abstract
A chapter on interaction of RF plasmas and amorphous silicon
Original language | English |
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Title of host publication | Proceedings of the 8th international workshop on applied physics of condensed matter |
Editors | J. Mudron, J. Mullerova, P. Sutta, L. Harmatha |
Pages | 214-215 |
Number of pages | 2 |
Publication status | Published - 2002 |
Event | 8th International workshop on applied physics of condensed matter - Liptovsky Mikulas, Demanovska Dolina, Slovakia Duration: 19 Jun 2002 → 22 Jun 2002 |
Conference
Conference | 8th International workshop on applied physics of condensed matter |
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Country/Territory | Slovakia |
City | Liptovsky Mikulas, Demanovska Dolina, |
Period | 19/06/02 → 22/06/02 |
Keywords
- interaction
- rf plasmas
- amorphous silicon