Abstract
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the 8th international workshop on applied physics of condensed matter |
| Editors | J. Mudron, J. Mullerova, P. Sutta, L. Harmatha |
| Pages | 214-215 |
| Number of pages | 2 |
| Publication status | Published - 2002 |
| Event | 8th International workshop on applied physics of condensed matter - Liptovsky Mikulas, Demanovska Dolina, Slovakia Duration: 19 Jun 2002 → 22 Jun 2002 |
Conference
| Conference | 8th International workshop on applied physics of condensed matter |
|---|---|
| Country | Slovakia |
| City | Liptovsky Mikulas, Demanovska Dolina, |
| Period | 19/06/02 → 22/06/02 |
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Keywords
- interaction
- rf plasmas
- amorphous silicon
Cite this
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On interaction of RF plasmas and amorphous silicon. / Pincik, E. ; Gmucova, K.; Jergel, M. ; Mullerova, J.; Gleskova, H.; Nadazdy, V.; van Swaaij, R. A. C. M. M.; Durny, R.; Brunner, R.; Zeman, M.; Kucera , M. ; Ortega, L. ; Zahoran, M. .
Proceedings of the 8th international workshop on applied physics of condensed matter. ed. / J. Mudron; J. Mullerova; P. Sutta; L. Harmatha. 2002. p. 214-215.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book
TY - GEN
T1 - On interaction of RF plasmas and amorphous silicon
AU - Pincik, E.
AU - Gmucova, K.
AU - Jergel, M.
AU - Mullerova, J.
AU - Gleskova, H.
AU - Nadazdy, V.
AU - van Swaaij, R. A. C. M. M.
AU - Durny, R.
AU - Brunner, R.
AU - Zeman, M.
AU - Kucera , M.
AU - Ortega, L.
AU - Zahoran, M.
PY - 2002
Y1 - 2002
N2 - A chapter on interaction of RF plasmas and amorphous silicon
AB - A chapter on interaction of RF plasmas and amorphous silicon
KW - interaction
KW - rf plasmas
KW - amorphous silicon
M3 - Conference contribution book
SN - 8080401861
SP - 214
EP - 215
BT - Proceedings of the 8th international workshop on applied physics of condensed matter
A2 - Mudron, J.
A2 - Mullerova, J.
A2 - Sutta, P.
A2 - Harmatha, L.
ER -