On interaction of low-energy particles with a-Si:H and a-SiGe:H thin films

E. Pincik, H. Gleskova, M. Zahoran, K. Gmucova, M. Jergel, C. Falcony, L. Ortega, R. Brunner, T. Holoubek, R. Jurani

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

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Engineering

Biochemistry, Genetics and Molecular Biology