On interaction of low-energy particles with a-Si:H and a-SiGe:H thin films

E. Pincik, H. Gleskova, M. Zahoran, K. Gmucova, M. Jergel, C. Falcony, L. Ortega, R. Brunner, T. Holoubek, R. Jurani

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

Abstract

A chapter on the interaction of low-energy particles with a-Si:H and a-SiGe:H thin films
Original languageEnglish
Title of host publicationBook of abstracts
Subtitle of host publication12th international conference on thin films (ICTF 12)
EditorsE. Majkova, S. Luby
Place of PublicationBratislava, Slovakia
Number of pages58
Publication statusPublished - 2002
Event12th International Conference on Thin Films - Bratislava, Slovakia
Duration: 15 Sep 200220 Sep 2002

Conference

Conference12th International Conference on Thin Films
CountrySlovakia
CityBratislava
Period15/09/0220/09/02

Keywords

  • interaction
  • low-energy particles
  • thin films

Cite this