On interaction of low-energy particles with a-Si:H and a-SiGe:H thin films

E. Pincik, H. Gleskova, M. Zahoran, K. Gmucova, M. Jergel, C. Falcony, L. Ortega, R. Brunner, T. Holoubek, R. Jurani

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

Abstract

A chapter on the interaction of low-energy particles with a-Si:H and a-SiGe:H thin films
LanguageEnglish
Title of host publicationBook of abstracts
Subtitle of host publication12th international conference on thin films (ICTF 12)
EditorsE. Majkova, S. Luby
Place of PublicationBratislava, Slovakia
Number of pages58
Publication statusPublished - 2002
Event12th International Conference on Thin Films - Bratislava, Slovakia
Duration: 15 Sep 200220 Sep 2002

Conference

Conference12th International Conference on Thin Films
CountrySlovakia
CityBratislava
Period15/09/0220/09/02

Fingerprint

particle energy
thin films
interactions

Keywords

  • interaction
  • low-energy particles
  • thin films

Cite this

Pincik, E., Gleskova, H., Zahoran, M., Gmucova, K., Jergel, M., Falcony, C., ... Jurani, R. (2002). On interaction of low-energy particles with a-Si:H and a-SiGe:H thin films. In E. Majkova, & S. Luby (Eds.), Book of abstracts: 12th international conference on thin films (ICTF 12) Bratislava, Slovakia.
Pincik, E. ; Gleskova, H. ; Zahoran, M. ; Gmucova, K. ; Jergel, M. ; Falcony, C. ; Ortega, L. ; Brunner, R. ; Holoubek, T. ; Jurani, R. / On interaction of low-energy particles with a-Si:H and a-SiGe:H thin films. Book of abstracts: 12th international conference on thin films (ICTF 12). editor / E. Majkova ; S. Luby. Bratislava, Slovakia, 2002.
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abstract = "A chapter on the interaction of low-energy particles with a-Si:H and a-SiGe:H thin films",
keywords = "interaction, low-energy particles, thin films",
author = "E. Pincik and H. Gleskova and M. Zahoran and K. Gmucova and M. Jergel and C. Falcony and L. Ortega and R. Brunner and T. Holoubek and R. Jurani",
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Pincik, E, Gleskova, H, Zahoran, M, Gmucova, K, Jergel, M, Falcony, C, Ortega, L, Brunner, R, Holoubek, T & Jurani, R 2002, On interaction of low-energy particles with a-Si:H and a-SiGe:H thin films. in E Majkova & S Luby (eds), Book of abstracts: 12th international conference on thin films (ICTF 12). Bratislava, Slovakia, 12th International Conference on Thin Films, Bratislava, Slovakia, 15/09/02.

On interaction of low-energy particles with a-Si:H and a-SiGe:H thin films. / Pincik, E. ; Gleskova, H.; Zahoran, M. ; Gmucova, K.; Jergel, M. ; Falcony, C.; Ortega, L. ; Brunner, R.; Holoubek, T.; Jurani, R.

Book of abstracts: 12th international conference on thin films (ICTF 12). ed. / E. Majkova; S. Luby. Bratislava, Slovakia, 2002.

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

TY - GEN

T1 - On interaction of low-energy particles with a-Si:H and a-SiGe:H thin films

AU - Pincik, E.

AU - Gleskova, H.

AU - Zahoran, M.

AU - Gmucova, K.

AU - Jergel, M.

AU - Falcony, C.

AU - Ortega, L.

AU - Brunner, R.

AU - Holoubek, T.

AU - Jurani, R.

PY - 2002

Y1 - 2002

N2 - A chapter on the interaction of low-energy particles with a-Si:H and a-SiGe:H thin films

AB - A chapter on the interaction of low-energy particles with a-Si:H and a-SiGe:H thin films

KW - interaction

KW - low-energy particles

KW - thin films

UR - http://www.ictf12.savba.sk/

M3 - Conference contribution book

SN - 8022407372

BT - Book of abstracts

A2 - Majkova, E.

A2 - Luby, S.

CY - Bratislava, Slovakia

ER -

Pincik E, Gleskova H, Zahoran M, Gmucova K, Jergel M, Falcony C et al. On interaction of low-energy particles with a-Si:H and a-SiGe:H thin films. In Majkova E, Luby S, editors, Book of abstracts: 12th international conference on thin films (ICTF 12). Bratislava, Slovakia. 2002