Abstract
| Original language | English |
|---|---|
| Title of host publication | Book of abstracts |
| Subtitle of host publication | 12th international conference on thin films (ICTF 12) |
| Editors | E. Majkova, S. Luby |
| Place of Publication | Bratislava, Slovakia |
| Number of pages | 58 |
| Publication status | Published - 2002 |
| Event | 12th International Conference on Thin Films - Bratislava, Slovakia Duration: 15 Sep 2002 → 20 Sep 2002 |
Conference
| Conference | 12th International Conference on Thin Films |
|---|---|
| Country | Slovakia |
| City | Bratislava |
| Period | 15/09/02 → 20/09/02 |
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Keywords
- interaction
- low-energy particles
- thin films
Cite this
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On interaction of low-energy particles with a-Si:H and a-SiGe:H thin films. / Pincik, E. ; Gleskova, H.; Zahoran, M. ; Gmucova, K.; Jergel, M. ; Falcony, C.; Ortega, L. ; Brunner, R.; Holoubek, T.; Jurani, R.
Book of abstracts: 12th international conference on thin films (ICTF 12). ed. / E. Majkova; S. Luby. Bratislava, Slovakia, 2002.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book
TY - GEN
T1 - On interaction of low-energy particles with a-Si:H and a-SiGe:H thin films
AU - Pincik, E.
AU - Gleskova, H.
AU - Zahoran, M.
AU - Gmucova, K.
AU - Jergel, M.
AU - Falcony, C.
AU - Ortega, L.
AU - Brunner, R.
AU - Holoubek, T.
AU - Jurani, R.
PY - 2002
Y1 - 2002
N2 - A chapter on the interaction of low-energy particles with a-Si:H and a-SiGe:H thin films
AB - A chapter on the interaction of low-energy particles with a-Si:H and a-SiGe:H thin films
KW - interaction
KW - low-energy particles
KW - thin films
UR - http://www.ictf12.savba.sk/
M3 - Conference contribution book
SN - 8022407372
BT - Book of abstracts
A2 - Majkova, E.
A2 - Luby, S.
CY - Bratislava, Slovakia
ER -