On interaction of low-energy particles with a-Si:H and a-SiGe:H thin films

E.  Pincik; H. Gleskova; M.  Zahoran; K. Gmucova; M.  Jergel; C. Falcony; L.  Ortega; R. Brunner; T. Holoubek; R. Jurani

On interaction of low-energy particles with a-Si:H and a-SiGe:H thin films

E. Pincik, H. Gleskova, M. Zahoran, K. Gmucova, M. Jergel, C. Falcony, L. Ortega, R. Brunner, T. Holoubek, R. Jurani

Electronic And Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

Abstract

A chapter on the interaction of low-energy particles with a-Si:H and a-SiGe:H thin films

Original language	English
Title of host publication	Book of abstracts
Subtitle of host publication	12th international conference on thin films (ICTF 12)
Editors	E. Majkova, S. Luby
Place of Publication	Bratislava, Slovakia
Number of pages	58
Publication status	Published - 2002
Event	12th International Conference on Thin Films - Bratislava, Slovakia Duration: 15 Sep 2002 → 20 Sep 2002

Conference

Conference	12th International Conference on Thin Films
Country	Slovakia
City	Bratislava
Period	15/09/02 → 20/09/02

Keywords

interaction
low-energy particles
thin films

Access to Document

http://www.ictf12.savba.sk/

Cite this

@inproceedings{ba544b01581c44a5b1048fa091d3af8f,

title = "On interaction of low-energy particles with a-Si:H and a-SiGe:H thin films",

abstract = "A chapter on the interaction of low-energy particles with a-Si:H and a-SiGe:H thin films",

keywords = "interaction, low-energy particles, thin films",

author = "E. Pincik and H. Gleskova and M. Zahoran and K. Gmucova and M. Jergel and C. Falcony and L. Ortega and R. Brunner and T. Holoubek and R. Jurani",

year = "2002",

language = "English",

isbn = "8022407372",

editor = "E. Majkova and S. Luby",

booktitle = "Book of abstracts",

note = "12th International Conference on Thin Films ; Conference date: 15-09-2002 Through 20-09-2002",

}

Pincik, E, Gleskova, H, Zahoran, M, Gmucova, K, Jergel, M, Falcony, C, Ortega, L, Brunner, R, Holoubek, T & Jurani, R 2002, On interaction of low-energy particles with a-Si:H and a-SiGe:H thin films. in E Majkova & S Luby (eds), Book of abstracts: 12th international conference on thin films (ICTF 12). Bratislava, Slovakia, 12th International Conference on Thin Films, Bratislava, Slovakia, 15/09/02.

On interaction of low-energy particles with a-Si:H and a-SiGe:H thin films. / Pincik, E. ; Gleskova, H.; Zahoran, M. ; Gmucova, K.; Jergel, M. ; Falcony, C.; Ortega, L. ; Brunner, R.; Holoubek, T.; Jurani, R.

Book of abstracts: 12th international conference on thin films (ICTF 12). ed. / E. Majkova; S. Luby. Bratislava, Slovakia, 2002.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

TY - GEN

T1 - On interaction of low-energy particles with a-Si:H and a-SiGe:H thin films

AU - Pincik, E.

AU - Gleskova, H.

AU - Zahoran, M.

AU - Gmucova, K.

AU - Jergel, M.

AU - Falcony, C.

AU - Ortega, L.

AU - Brunner, R.

AU - Holoubek, T.

AU - Jurani, R.

PY - 2002

Y1 - 2002

N2 - A chapter on the interaction of low-energy particles with a-Si:H and a-SiGe:H thin films

AB - A chapter on the interaction of low-energy particles with a-Si:H and a-SiGe:H thin films

KW - interaction

KW - low-energy particles

KW - thin films

UR - http://www.ictf12.savba.sk/

M3 - Conference contribution book

SN - 8022407372

BT - Book of abstracts

A2 - Majkova, E.

A2 - Luby, S.

CY - Bratislava, Slovakia

T2 - 12th International Conference on Thin Films

Y2 - 15 September 2002 through 20 September 2002

ER -