Abstract
A chapter on the interaction of low-energy particles with a-Si:H and a-SiGe:H thin films
Original language | English |
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Title of host publication | Book of abstracts |
Subtitle of host publication | 12th international conference on thin films (ICTF 12) |
Editors | E. Majkova, S. Luby |
Place of Publication | Bratislava, Slovakia |
Number of pages | 58 |
Publication status | Published - 2002 |
Event | 12th International Conference on Thin Films - Bratislava, Slovakia Duration: 15 Sep 2002 → 20 Sep 2002 |
Conference
Conference | 12th International Conference on Thin Films |
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Country/Territory | Slovakia |
City | Bratislava |
Period | 15/09/02 → 20/09/02 |
Keywords
- interaction
- low-energy particles
- thin films