On-chip frequency tuning of fast resonant MEMS scanner

Paul Janin, Deepak Uttamchandani, Ralf Bauer

Research output: Contribution to journal › Article › peer-review

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Data for: "On-chip frequency tuning of fast resonant MEMS scanner"
Bauer, R. (Creator), JANIN, P. (Contributor) & Uttamchandani, D. (Supervisor), University of Strathclyde, 13 Jun 2022
DOI: 10.15129/c589d644-e614-4c0c-80b6-5af7fe786492
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