On-chip frequency tuning of fast resonant MEMS scanner

The development and characterisation of a piezoelectric actuated high-frequency MEMS scanning mirror with on-chip frequency tuning capability is reported. The resonant scanner operates at frequencies in excess of 140 kHz, generating scan angles of 10 ∘ and 6 ∘ for two orthogonal movement modes with 40 V actuation. On-chip frequency tuning is achieved through electrothermal actuators fabricated adjacent to the mirror main suspension. The electrothermal actuators produce a global and local temperature increase which changes the suspension stiffness and therefore the resonant frequency. A resonance frequency tuning range of up to 5.5 kHz is achieved, with tuning dominant on only one of the two orthogonal scan movement modes. This opens the possibility for precise tuning of a 2D Lissajous scan pattern using a single resonant MEMS scanner with dual orthogonal resonant modes producing full frame update rates up to 20 kHz while retaining the full angular range of both resonant movement modes.