Abstract
A chapter on a transformation of a-Si:H surface due to very low-energy particle impacts to very thin insulating overlayer of device quality
Original language | English |
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Title of host publication | Book of abstracts |
Subtitle of host publication | Superficies y vacio |
Place of Publication | Veracruz, Mexico |
Number of pages | 7 |
Publication status | Published - 2002 |
Event | XXII Congreso Nacional - Veracruz, Mexico Duration: 1 Oct 2002 → 1 Oct 2002 |
Conference
Conference | XXII Congreso Nacional |
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Country | Mexico |
City | Veracruz |
Period | 1/10/02 → 1/10/02 |
Keywords
- transformation
- a-si:h surface
- low energy particle
- gap states
- X-ray diffraction