On a transformation of a-Si:H surface due to very low-energy particle impacts to very thin insulating overlayer of device quality

E. Pincik, C. Falcony, H. Gleskova, R. Brunner, L. Ortega, V. Nadazdy, J. Mullerova, K. Gmucova, R. Durny

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

Abstract

A chapter on a transformation of a-Si:H surface due to very low-energy particle impacts to very thin insulating overlayer of device quality
Original languageEnglish
Title of host publicationBook of abstracts
Subtitle of host publicationSuperficies y vacio
Place of PublicationVeracruz, Mexico
Number of pages7
Publication statusPublished - 2002
EventXXII Congreso Nacional - Veracruz, Mexico
Duration: 1 Oct 20021 Oct 2002

Conference

ConferenceXXII Congreso Nacional
CountryMexico
CityVeracruz
Period1/10/021/10/02

Keywords

  • transformation
  • a-si:h surface
  • low energy particle
  • gap states
  • X-ray diffraction

Cite this

Pincik, E., Falcony, C., Gleskova, H., Brunner, R., Ortega, L., Nadazdy, V., Mullerova, J., Gmucova, K., & Durny, R. (2002). On a transformation of a-Si:H surface due to very low-energy particle impacts to very thin insulating overlayer of device quality. In Book of abstracts: Superficies y vacio