On a transformation of a-Si:H surface due to very low-energy particle impacts to very thin insulating overlayer of device quality

E.  Pincik; C. Falcony; H. Gleskova; R. Brunner; L.  Ortega; V. Nadazdy; J. Mullerova; K. Gmucova; R. Durny

On a transformation of a-Si:H surface due to very low-energy particle impacts to very thin insulating overlayer of device quality

E. Pincik, C. Falcony, H. Gleskova, R. Brunner, L. Ortega, V. Nadazdy, J. Mullerova, K. Gmucova, R. Durny

Electronic And Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

Abstract

A chapter on a transformation of a-Si:H surface due to very low-energy particle impacts to very thin insulating overlayer of device quality

Original language	English
Title of host publication	Book of abstracts
Subtitle of host publication	Superficies y vacio
Place of Publication	Veracruz, Mexico
Number of pages	7
Publication status	Published - 2002
Event	XXII Congreso Nacional - Veracruz, Mexico Duration: 1 Oct 2002 → 1 Oct 2002

Conference

Conference	XXII Congreso Nacional
Country/Territory	Mexico
City	Veracruz
Period	1/10/02 → 1/10/02

Keywords

transformation
a-si:h surface
low energy particle
gap states
X-ray diffraction

Cite this

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title = "On a transformation of a-Si:H surface due to very low-energy particle impacts to very thin insulating overlayer of device quality",

abstract = "A chapter on a transformation of a-Si:H surface due to very low-energy particle impacts to very thin insulating overlayer of device quality",

keywords = "transformation, a-si:h surface, low energy particle, gap states, X-ray diffraction",

author = "E. Pincik and C. Falcony and H. Gleskova and R. Brunner and L. Ortega and V. Nadazdy and J. Mullerova and K. Gmucova and R. Durny",

year = "2002",

language = "English",

booktitle = "Book of abstracts",

note = "XXII Congreso Nacional ; Conference date: 01-10-2002 Through 01-10-2002",

}

On a transformation of a-Si:H surface due to very low-energy particle impacts to very thin insulating overlayer of device quality. / Pincik, E. ; Falcony, C.; Gleskova, H.; Brunner, R.; Ortega, L. ; Nadazdy, V.; Mullerova, J.; Gmucova, K.; Durny, R.

Book of abstracts: Superficies y vacio. Veracruz, Mexico, 2002.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

TY - GEN

T1 - On a transformation of a-Si:H surface due to very low-energy particle impacts to very thin insulating overlayer of device quality

AU - Pincik, E.

AU - Falcony, C.

AU - Gleskova, H.

AU - Brunner, R.

AU - Ortega, L.

AU - Nadazdy, V.

AU - Mullerova, J.

AU - Gmucova, K.

AU - Durny, R.

PY - 2002

Y1 - 2002

N2 - A chapter on a transformation of a-Si:H surface due to very low-energy particle impacts to very thin insulating overlayer of device quality

AB - A chapter on a transformation of a-Si:H surface due to very low-energy particle impacts to very thin insulating overlayer of device quality

KW - transformation

KW - a-si:h surface

KW - low energy particle

KW - gap states

KW - X-ray diffraction

M3 - Conference contribution book

BT - Book of abstracts

CY - Veracruz, Mexico

T2 - XXII Congreso Nacional

Y2 - 1 October 2002 through 1 October 2002

ER -

On a transformation of a-Si:H surface due to very low-energy particle impacts to very thin insulating overlayer of device quality

Abstract

Conference

Keywords

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Cite this