Abstract
| Language | English |
|---|---|
| Pages | 633-639 |
| Number of pages | 6 |
| Journal | Applied Physics A: Materials Science and Processing |
| Volume | 94 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 15 Aug 2009 |
Fingerprint
Keywords
- ohmic contact formation
- heterostructure
- gallium nitride
- semiconductors
- photonics
Cite this
}
Ohmic contact formation to bulk and heterostructure gallium nitride family semiconductors. / Rahman, F.; Xu, S.; Watson, I.M.; Mutha, D.K.B.; Oxland, R.K.; Johnson, N.P.; Bannerjee, A.; Wasige, E.
In: Applied Physics A: Materials Science and Processing, Vol. 94, No. 3, 15.08.2009, p. 633-639.Research output: Contribution to journal › Article
TY - JOUR
T1 - Ohmic contact formation to bulk and heterostructure gallium nitride family semiconductors
AU - Rahman, F.
AU - Xu, S.
AU - Watson, I.M.
AU - Mutha, D.K.B.
AU - Oxland, R.K.
AU - Johnson, N.P.
AU - Bannerjee, A.
AU - Wasige, E.
PY - 2009/8/15
Y1 - 2009/8/15
N2 - We describe experiments investigating the quality of ohmic contacts to both bulk GaN and to III-nitride heterostructures. Titanium-based contacts were investigated to assess the role of intermixing and surface impurities for contact formation to n-type GaN. Direct contact to the two-dimensional electron gas in GaN/AlGaN heterostructures was also studied. These contacts were made by photochemical etching of the samples to expose the heterointerface. It was observed that even in the latter case contact annealing leads to a lower contact resistance by consuming surface contaminants and promoting beneficial interfacial reactions. Various passivation techniques were tried to reduce surface leakage current between contact pads and PECVD-deposited silicon nitride was found to be the best material for this application.
AB - We describe experiments investigating the quality of ohmic contacts to both bulk GaN and to III-nitride heterostructures. Titanium-based contacts were investigated to assess the role of intermixing and surface impurities for contact formation to n-type GaN. Direct contact to the two-dimensional electron gas in GaN/AlGaN heterostructures was also studied. These contacts were made by photochemical etching of the samples to expose the heterointerface. It was observed that even in the latter case contact annealing leads to a lower contact resistance by consuming surface contaminants and promoting beneficial interfacial reactions. Various passivation techniques were tried to reduce surface leakage current between contact pads and PECVD-deposited silicon nitride was found to be the best material for this application.
KW - ohmic contact formation
KW - heterostructure
KW - gallium nitride
KW - semiconductors
KW - photonics
UR - http://dx.doi.org/10.1007/s00339-008-4848-9
U2 - 10.1007/s00339-008-4848-9
DO - 10.1007/s00339-008-4848-9
M3 - Article
VL - 94
SP - 633
EP - 639
JO - Applied Physics A: Materials Science and Processing
T2 - Applied Physics A: Materials Science and Processing
JF - Applied Physics A: Materials Science and Processing
SN - 0947-8396
IS - 3
ER -