Oblique nanomachining of gallium arsenide explained using AFM experiments and MD simulations

Pengfei Fan, Nirmal Kumar Katiyar, Saurav Goel^*, Yang He, Yanquan Geng, Yongda Yan, Hui Mao, Xichun Luo

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

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Micro-3D: Miniature Flexible & Reconfigurable Manufacturing System for 3D Micro-products
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