Novel processing technology for microelectronics

S. Wagner; Helena Gleskova; J. C. Sturm; Z. Suo

Novel processing technology for microelectronics

S. Wagner, Helena Gleskova, J. C. Sturm, Z. Suo

Electronic And Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Original language	English
Title of host publication	Technology and applications of hydrogenated amorphous silicon
Editors	R. A. Street
Place of Publication	Berlin, Germany
Publisher	Springer
Pages	222-251
Number of pages	30
Volume	37
ISBN (Print)	9783540657149
Publication status	Published - 2000

Publication series

Name	Materials Science
Publisher	Springer-Verlag
Volume	37

Keywords

novel
processing technology
microelectronics

Cite this

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title = "Novel processing technology for microelectronics",

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author = "S. Wagner and Helena Gleskova and Sturm, \{J. C.\} and Z. Suo",

year = "2000",

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volume = "37",

series = "Materials Science",

publisher = "Springer",

pages = "222--251",

editor = "Street, \{R. A.\}",

booktitle = "Technology and applications of hydrogenated amorphous silicon",

address = "Switzerland",

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TY - CHAP

T1 - Novel processing technology for microelectronics

AU - Wagner, S.

AU - Gleskova, Helena

AU - Sturm, J. C.

AU - Suo, Z.

PY - 2000

Y1 - 2000

KW - novel

KW - processing technology

KW - microelectronics

UR - http://www.springer.com/engineering/electronics/book/978-3-540-65714-9?cm_mmc=Google-_-Book%20Search-_-Springer-_-0

M3 - Chapter

SN - 9783540657149

VL - 37

T3 - Materials Science

SP - 222

EP - 251

BT - Technology and applications of hydrogenated amorphous silicon

A2 - Street, R. A.

PB - Springer

CY - Berlin, Germany

ER -

Novel processing technology for microelectronics

Publication series

Keywords

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Cite this