Novel processing technology for microelectronics

S. Wagner, Helena Gleskova, J. C. Sturm, Z. Suo

Research output: Chapter in Book/Report/Conference proceedingChapter

Original languageEnglish
Title of host publicationTechnology and applications of hydrogenated amorphous silicon
EditorsR. A. Street
Place of PublicationBerlin, Germany
PublisherSpringer
Pages222-251
Number of pages30
Volume37
ISBN (Print)9783540657149
Publication statusPublished - 2000

Publication series

NameMaterials Science
PublisherSpringer-Verlag
Volume37

Keywords

  • novel
  • processing technology
  • microelectronics

Cite this

Wagner, S., Gleskova, H., Sturm, J. C., & Suo, Z. (2000). Novel processing technology for microelectronics. In R. A. Street (Ed.), Technology and applications of hydrogenated amorphous silicon (Vol. 37, pp. 222-251). (Materials Science; Vol. 37). Springer.