Novel polymer systems for deep UV microlens arrays

A.R. Mackintosh; A.J. Kuehne; R.A. Pethrick; B.J.E. Guilhabert; E. Gu; C.L. Lee; M.D. Dawson; G. Heliotis; D.D.C. Bradley

doi:10.1088/0022-3727/41/9/094007

Novel polymer systems for deep UV microlens arrays

A.R. Mackintosh, A.J. Kuehne, R.A. Pethrick, B.J.E. Guilhabert, E. Gu, C.L. Lee, M.D. Dawson, G. Heliotis, D.D.C. Bradley

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

We report for the first time a UV curable polymer with effective optical transmission below 300 nm. Through careful control of kinetics, various viscosities can be generated to optimize the film forming properties via spin coating. The transmission of the monomers and films is investigated over a spectral range which spans the 240-370 nm output of ultraviolet AlInGaN light-emitting diodes. The refractive index of the polymer has been measured by ellipsometry to give a value of 1.57 at 280 nm. Using standard lithography techniques with reactive ion etching, arrays of microlenses have been fabricated in this polymer with diameters of 30μm and below and are characterized by atomic force microscopy and confocal microscopy.

Original language	English
Pages (from-to)	094007
Number of pages	7
Journal	Journal of Physics D: Applied Physics
Volume	41
Issue number	9
DOIs	https://doi.org/10.1088/0022-3727/41/9/094007
Publication status	Published - 4 Apr 2008

Keywords

UV curable polymer
optical transmission
viscosity
spin coating
spectral range
ultraviolet
atomic force microscopy
confocal microscopy

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10.1088/0022-3727/41/9/094007

Cite this

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title = "Novel polymer systems for deep UV microlens arrays",

abstract = "We report for the first time a UV curable polymer with effective optical transmission below 300 nm. Through careful control of kinetics, various viscosities can be generated to optimize the film forming properties via spin coating. The transmission of the monomers and films is investigated over a spectral range which spans the 240-370 nm output of ultraviolet AlInGaN light-emitting diodes. The refractive index of the polymer has been measured by ellipsometry to give a value of 1.57 at 280 nm. Using standard lithography techniques with reactive ion etching, arrays of microlenses have been fabricated in this polymer with diameters of 30μm and below and are characterized by atomic force microscopy and confocal microscopy.",

keywords = "UV curable polymer, optical transmission, viscosity, spin coating, spectral range, ultraviolet, atomic force microscopy, confocal microscopy",

author = "A.R. Mackintosh and A.J. Kuehne and R.A. Pethrick and B.J.E. Guilhabert and E. Gu and C.L. Lee and M.D. Dawson and G. Heliotis and D.D.C. Bradley",

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TY - JOUR

T1 - Novel polymer systems for deep UV microlens arrays

AU - Mackintosh, A.R.

AU - Kuehne, A.J.

AU - Pethrick, R.A.

AU - Guilhabert, B.J.E.

AU - Gu, E.

AU - Lee, C.L.

AU - Dawson, M.D.

AU - Heliotis, G.

AU - Bradley, D.D.C.

PY - 2008/4/4

Y1 - 2008/4/4

N2 - We report for the first time a UV curable polymer with effective optical transmission below 300 nm. Through careful control of kinetics, various viscosities can be generated to optimize the film forming properties via spin coating. The transmission of the monomers and films is investigated over a spectral range which spans the 240-370 nm output of ultraviolet AlInGaN light-emitting diodes. The refractive index of the polymer has been measured by ellipsometry to give a value of 1.57 at 280 nm. Using standard lithography techniques with reactive ion etching, arrays of microlenses have been fabricated in this polymer with diameters of 30μm and below and are characterized by atomic force microscopy and confocal microscopy.

AB - We report for the first time a UV curable polymer with effective optical transmission below 300 nm. Through careful control of kinetics, various viscosities can be generated to optimize the film forming properties via spin coating. The transmission of the monomers and films is investigated over a spectral range which spans the 240-370 nm output of ultraviolet AlInGaN light-emitting diodes. The refractive index of the polymer has been measured by ellipsometry to give a value of 1.57 at 280 nm. Using standard lithography techniques with reactive ion etching, arrays of microlenses have been fabricated in this polymer with diameters of 30μm and below and are characterized by atomic force microscopy and confocal microscopy.

KW - UV curable polymer

KW - optical transmission

KW - viscosity

KW - spin coating

KW - spectral range

KW - ultraviolet

KW - atomic force microscopy

KW - confocal microscopy

UR - http://www.iop.org/EJ/abstract/0022-3727/41/9/094007

U2 - 10.1088/0022-3727/41/9/094007

DO - 10.1088/0022-3727/41/9/094007

M3 - Article

SN - 0022-3727

VL - 41

SP - 094007

JO - Journal of Physics D: Applied Physics

JF - Journal of Physics D: Applied Physics

IS - 9

ER -

Novel polymer systems for deep UV microlens arrays

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Semiconductor-Based Hybrid Structures for Ultraviolet Micro-Devices

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Novel polymer systems for deep UV microlens arrays

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Semiconductor-Based Hybrid Structures for Ultraviolet Micro-Devices

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