Nonequilibrium and effect of gas mixtures in an atmospheric microplasma

Davide Mariotti

doi:10.1063/1.2912039

Nonequilibrium and effect of gas mixtures in an atmospheric microplasma

Davide Mariotti^*

^*Corresponding author for this work

Design, Manufacturing And Engineering Management

Research output: Contribution to journal › Article › peer-review

91 Citations (Scopus)

Abstract

The gas and effective electron temperatures have been estimated for atmospheric microplasma by means of optical emission spectroscopy. The results have shown that the microplasma exhibits nonequilibrium and, as its size is reduced, the two temperatures depart from each other, enhancing the nonequilibrium characteristic. The effect of methane and oxygen concentrations has also been studied, showing that gas mixtures have an important effect on the microplasma state.

Original language	English
Article number	151505
Journal	Applied Physics Letters
Volume	92
Issue number	15
DOIs	https://doi.org/10.1063/1.2912039
Publication status	Published - 17 Apr 2008

Keywords

nanofabrication
lepton plasma flow
plasmas
transition metals

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10.1063/1.2912039

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abstract = "The gas and effective electron temperatures have been estimated for atmospheric microplasma by means of optical emission spectroscopy. The results have shown that the microplasma exhibits nonequilibrium and, as its size is reduced, the two temperatures depart from each other, enhancing the nonequilibrium characteristic. The effect of methane and oxygen concentrations has also been studied, showing that gas mixtures have an important effect on the microplasma state.",

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AB - The gas and effective electron temperatures have been estimated for atmospheric microplasma by means of optical emission spectroscopy. The results have shown that the microplasma exhibits nonequilibrium and, as its size is reduced, the two temperatures depart from each other, enhancing the nonequilibrium characteristic. The effect of methane and oxygen concentrations has also been studied, showing that gas mixtures have an important effect on the microplasma state.

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KW - lepton plasma flow

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KW - transition metals

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Nonequilibrium and effect of gas mixtures in an atmospheric microplasma

Abstract

Keywords

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