Projects per year
Abstract
The structural, chemical and electrical properties of Ni/Au contacts to the atomic layer deposited α-Ga 2O 3 were investigated. Ni forms a Schottky contact with α-Ga 2O 3, irrespectively of the post-annealing temperature. No sign of metal oxidation was observed at the metal-semiconductor interface (unlike what is observed for other metals like Ti), and instead, the metallurgical processes of the Ni-Au bilayer dominate the electrical properties. It is found that 400 °C-450 °C is the optimal annealing temperature, which allows for metal diffusion to heal gaps at the metal/semiconductor interface, but is not sufficient for Ni and Au to significantly interdiffuse and form an alloy with compositional inhomogeneities.
Original language | English |
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Article number | SF1008 |
Number of pages | 5 |
Journal | Japanese Journal of Applied Physics |
Volume | 62 |
Issue number | SF |
Early online date | 15 Feb 2023 |
DOIs | |
Publication status | Published - 30 Jun 2023 |
Keywords
- Ni/Au contacts
- corundum
- α-Ga2O3
- annealing temperature
- alloys
- gallium oxide (Ga2O3)
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Dive into the research topics of 'Ni/Au contacts to corundum α-Ga2O3'. Together they form a unique fingerprint.Projects
- 2 Finished
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Doctoral Training Partnership 2020-2021 University of Strathclyde | Nicol, David
Massabuau, F. (Principal Investigator), Martin, R. (Co-investigator) & Nicol, D. (Research Co-investigator)
EPSRC (Engineering and Physical Sciences Research Council)
1/10/20 → 1/02/24
Project: Research Studentship - Internally Allocated
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Time-resolved photoconductivity of wide bandgap semiconductors
Massabuau, F. (Principal Investigator)
9/03/20 → 8/03/22
Project: Research
Datasets
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Data for: "Ni/Au contacts to corundum α-Ga2O3"
Massabuau, F. (Creator), Adams, F. (Creator), Nicol, D. (Creator), Jarman, J. (Creator), Frentrup, M. (Creator), Roberts, J. (Creator), O'Hanlon, T. (Creator), Kovacs, A. (Creator), Chalker, P. (Creator) & Oliver, R. (Creator), University of Strathclyde, 13 Feb 2023
DOI: 10.15129/57613865-46f0-47e7-b25e-423519cf180f
Dataset