Nanoscale accurate heterogeneous integration of waveguide devices by transfer printing

B. Guilhabert; J. McPhillimy; C. Klitis; M.D. Dawson; M. Sorel; M.J. Strain

doi:10.1109/IPCon.2018.8527135

Nanoscale accurate heterogeneous integration of waveguide devices by transfer printing

B. Guilhabert, J. McPhillimy, C. Klitis, M.D. Dawson, M. Sorel, M.J. Strain

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

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Abstract

The vertical micro-assembly of membrane photonic devices across a range of materials is presented, including polymers, silicon and III-V semiconductors. Fully-fabricated waveguide structures are integrated with sub-100nm absolute placement accuracy. Light-emitting diodes, silicon photonics and nanowire lasers are examples of the deployment of this technique.

Original language	English
Title of host publication	IEEE Photonics Conference 2018
Place of Publication	Piscataway, NJ
Publisher	IEEE
Pages	1-3
Number of pages	3
ISBN (Electronic)	9781538653586
ISBN (Print)	9781538653593
DOIs	https://doi.org/10.1109/IPCon.2018.8527135
Publication status	Published - 8 Nov 2018
Event	31st IEEE Photonics Conference, IPC 2018 - Reston, VA, USA, Reston, United States Duration: 30 Sept 2018 → 4 Oct 2018

Conference

Conference	31st IEEE Photonics Conference, IPC 2018
Country/Territory	United States
City	Reston
Period	30/09/18 → 4/10/18

Keywords

silicon on insulator
hybrid integrated circuits
nano positioning

Access to Document

10.1109/IPCon.2018.8527135

Guilhabert-etal-IEEE-PC-2018-Nanoscale-accurate-heterogeneous-integration-of-waveguide-devicesAccepted author manuscript, 270 KB

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title = "Nanoscale accurate heterogeneous integration of waveguide devices by transfer printing",

abstract = "The vertical micro-assembly of membrane photonic devices across a range of materials is presented, including polymers, silicon and III-V semiconductors. Fully-fabricated waveguide structures are integrated with sub-100nm absolute placement accuracy. Light-emitting diodes, silicon photonics and nanowire lasers are examples of the deployment of this technique.",

keywords = "silicon on insulator, hybrid integrated circuits, nano positioning",

author = "B. Guilhabert and J. McPhillimy and C. Klitis and M.D. Dawson and M. Sorel and M.J. Strain",

note = "{\textcopyright} Copyright 2018 IEEE - All rights reserved, including rights for text and data mining and training of artificial intelligence and similar technologies. B. Guilhabert, C. Klitis, J. McPhillimy, M. Sorel, M. D. Dawson and M. J. Strain, {"}Nanoscale Accurate Heterogeneous Integration of Waveguide Devices by Transfer Printing,{"} 2018 IEEE Photonics Conference (IPC), Reston, VA, USA, 2018, pp. 1-2, doi: 10.1109/IPCon.2018.8527135 ; 31st IEEE Photonics Conference, IPC 2018 ; Conference date: 30-09-2018 Through 04-10-2018",

year = "2018",

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doi = "10.1109/IPCon.2018.8527135",

language = "English",

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AU - Guilhabert, B.

AU - McPhillimy, J.

AU - Klitis, C.

AU - Dawson, M.D.

AU - Sorel, M.

AU - Strain, M.J.

N1 - © Copyright 2018 IEEE - All rights reserved, including rights for text and data mining and training of artificial intelligence and similar technologies. B. Guilhabert, C. Klitis, J. McPhillimy, M. Sorel, M. D. Dawson and M. J. Strain, "Nanoscale Accurate Heterogeneous Integration of Waveguide Devices by Transfer Printing," 2018 IEEE Photonics Conference (IPC), Reston, VA, USA, 2018, pp. 1-2, doi: 10.1109/IPCon.2018.8527135

PY - 2018/11/8

Y1 - 2018/11/8

N2 - The vertical micro-assembly of membrane photonic devices across a range of materials is presented, including polymers, silicon and III-V semiconductors. Fully-fabricated waveguide structures are integrated with sub-100nm absolute placement accuracy. Light-emitting diodes, silicon photonics and nanowire lasers are examples of the deployment of this technique.

AB - The vertical micro-assembly of membrane photonic devices across a range of materials is presented, including polymers, silicon and III-V semiconductors. Fully-fabricated waveguide structures are integrated with sub-100nm absolute placement accuracy. Light-emitting diodes, silicon photonics and nanowire lasers are examples of the deployment of this technique.

KW - silicon on insulator

KW - hybrid integrated circuits

KW - nano positioning

UR - https://ieee-ipc.org/

U2 - 10.1109/IPCon.2018.8527135

DO - 10.1109/IPCon.2018.8527135

M3 - Conference contribution book

SN - 9781538653593

SP - 1

EP - 3

BT - IEEE Photonics Conference 2018

PB - IEEE

CY - Piscataway, NJ

T2 - 31st IEEE Photonics Conference, IPC 2018

Y2 - 30 September 2018 through 4 October 2018

ER -

Nanoscale accurate heterogeneous integration of waveguide devices by transfer printing

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