Nanoscale accurate heterogeneous integration of waveguide devices by transfer printing

B. Guilhabert, J. McPhillimy, C. Klitis, M.D. Dawson, M. Sorel, M.J. Strain

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

18 Downloads (Pure)

Abstract

The vertical micro-assembly of membrane photonic devices across a range of materials is presented, including polymers, silicon and III-V semiconductors. Fully-fabricated waveguide structures are integrated with sub-100nm absolute placement accuracy. Light-emitting diodes, silicon photonics and nanowire lasers are examples of the deployment of this technique.
Original languageEnglish
Title of host publicationIEEE Photonics Conference 2018
Place of PublicationPiscataway, NJ
PublisherIEEE
Number of pages3
Publication statusAccepted/In press - 17 Jul 2018
Event31st IEEE Photonics Conference, IPC 2018 - Reston, VA, USA, Reston, United States
Duration: 30 Sep 20184 Oct 2018

Conference

Conference31st IEEE Photonics Conference, IPC 2018
CountryUnited States
CityReston
Period30/09/184/10/18

Keywords

  • silicon on insulator
  • hybrid integrated circuits
  • nano positioning

Cite this

Guilhabert, B., McPhillimy, J., Klitis, C., Dawson, M. D., Sorel, M., & Strain, M. J. (Accepted/In press). Nanoscale accurate heterogeneous integration of waveguide devices by transfer printing. In IEEE Photonics Conference 2018 IEEE.