Nanoscale accurate heterogeneous integration of waveguide devices by transfer printing

B. Guilhabert, J. McPhillimy, C. Klitis, M.D. Dawson, M. Sorel, M.J. Strain

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

1 Citation (Scopus)
28 Downloads (Pure)

Abstract

The vertical micro-assembly of membrane photonic devices across a range of materials is presented, including polymers, silicon and III-V semiconductors. Fully-fabricated waveguide structures are integrated with sub-100nm absolute placement accuracy. Light-emitting diodes, silicon photonics and nanowire lasers are examples of the deployment of this technique.
Original languageEnglish
Title of host publicationIEEE Photonics Conference 2018
Place of PublicationPiscataway, NJ
PublisherIEEE
Pages1-3
Number of pages3
ISBN (Electronic)9781538653586
ISBN (Print)9781538653593
DOIs
Publication statusPublished - 8 Nov 2018
Event31st IEEE Photonics Conference, IPC 2018 - Reston, VA, USA, Reston, United States
Duration: 30 Sept 20184 Oct 2018

Conference

Conference31st IEEE Photonics Conference, IPC 2018
Country/TerritoryUnited States
CityReston
Period30/09/184/10/18

Keywords

  • silicon on insulator
  • hybrid integrated circuits
  • nano positioning

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