Abstract
The vertical micro-assembly of membrane photonic devices across a range of materials is presented, including polymers, silicon and III-V semiconductors. Fully-fabricated waveguide structures are integrated with sub-100nm absolute placement accuracy. Light-emitting diodes, silicon photonics and nanowire lasers are examples of the deployment of this technique.
Original language | English |
---|---|
Title of host publication | IEEE Photonics Conference 2018 |
Place of Publication | Piscataway, NJ |
Publisher | IEEE |
Number of pages | 3 |
Publication status | Accepted/In press - 17 Jul 2018 |
Event | 31st IEEE Photonics Conference, IPC 2018 - Reston, VA, USA, Reston, United States Duration: 30 Sept 2018 → 4 Oct 2018 |
Conference
Conference | 31st IEEE Photonics Conference, IPC 2018 |
---|---|
Country/Territory | United States |
City | Reston |
Period | 30/09/18 → 4/10/18 |
Keywords
- silicon on insulator
- hybrid integrated circuits
- nano positioning