Nanoscale accurate heterogeneous integration of waveguide devices by transfer printing

B. Guilhabert; J. McPhillimy; C. Klitis; M.D. Dawson; M. Sorel; M.J. Strain

Nanoscale accurate heterogeneous integration of waveguide devices by transfer printing

B. Guilhabert, J. McPhillimy, C. Klitis, M.D. Dawson, M. Sorel, M.J. Strain

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Abstract

The vertical micro-assembly of membrane photonic devices across a range of materials is presented, including polymers, silicon and III-V semiconductors. Fully-fabricated waveguide structures are integrated with sub-100nm absolute placement accuracy. Light-emitting diodes, silicon photonics and nanowire lasers are examples of the deployment of this technique.

Original language	English
Title of host publication	IEEE Photonics Conference 2018
Place of Publication	Piscataway, NJ
Publisher	IEEE
Number of pages	3
Publication status	Accepted/In press - 17 Jul 2018
Event	31st IEEE Photonics Conference, IPC 2018 - Reston, VA, USA, Reston, United States Duration: 30 Sept 2018 → 4 Oct 2018

Conference

Conference	31st IEEE Photonics Conference, IPC 2018
Country/Territory	United States
City	Reston
Period	30/09/18 → 4/10/18

Keywords

silicon on insulator
hybrid integrated circuits
nano positioning

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Guilhabert-etal-IEEE-PC-2018-Nanoscale-accurate-heterogeneous-integration-of-waveguide-devicesAccepted author manuscript, 270 KB

Cite this

@inproceedings{f23cb86f747144e6b198a0af9cb8a6fb,

title = "Nanoscale accurate heterogeneous integration of waveguide devices by transfer printing",

abstract = "The vertical micro-assembly of membrane photonic devices across a range of materials is presented, including polymers, silicon and III-V semiconductors. Fully-fabricated waveguide structures are integrated with sub-100nm absolute placement accuracy. Light-emitting diodes, silicon photonics and nanowire lasers are examples of the deployment of this technique.",

keywords = "silicon on insulator, hybrid integrated circuits, nano positioning",

author = "B. Guilhabert and J. McPhillimy and C. Klitis and M.D. Dawson and M. Sorel and M.J. Strain",

year = "2018",

month = jul,

day = "17",

language = "English",

booktitle = "IEEE Photonics Conference 2018",

publisher = "IEEE",

note = "31st IEEE Photonics Conference, IPC 2018 ; Conference date: 30-09-2018 Through 04-10-2018",

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TY - GEN

T1 - Nanoscale accurate heterogeneous integration of waveguide devices by transfer printing

AU - Guilhabert, B.

AU - McPhillimy, J.

AU - Klitis, C.

AU - Dawson, M.D.

AU - Sorel, M.

AU - Strain, M.J.

PY - 2018/7/17

Y1 - 2018/7/17

N2 - The vertical micro-assembly of membrane photonic devices across a range of materials is presented, including polymers, silicon and III-V semiconductors. Fully-fabricated waveguide structures are integrated with sub-100nm absolute placement accuracy. Light-emitting diodes, silicon photonics and nanowire lasers are examples of the deployment of this technique.

AB - The vertical micro-assembly of membrane photonic devices across a range of materials is presented, including polymers, silicon and III-V semiconductors. Fully-fabricated waveguide structures are integrated with sub-100nm absolute placement accuracy. Light-emitting diodes, silicon photonics and nanowire lasers are examples of the deployment of this technique.

KW - silicon on insulator

KW - hybrid integrated circuits

KW - nano positioning

UR - https://ieee-ipc.org/

M3 - Conference contribution book

BT - IEEE Photonics Conference 2018

PB - IEEE

CY - Piscataway, NJ

T2 - 31st IEEE Photonics Conference, IPC 2018

Y2 - 30 September 2018 through 4 October 2018

ER -

Nanoscale accurate heterogeneous integration of waveguide devices by transfer printing

Abstract

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Keywords

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