The vertical micro-assembly of membrane photonic devices across a range of materials is presented, including polymers, silicon and III-V semiconductors. Fully-fabricated waveguide structures are integrated with sub-100nm absolute placement accuracy. Light-emitting diodes, silicon photonics and nanowire lasers are examples of the deployment of this technique.
|Title of host publication||IEEE Photonics Conference 2018|
|Place of Publication||Piscataway, NJ|
|Number of pages||3|
|Publication status||Accepted/In press - 17 Jul 2018|
|Event||31st IEEE Photonics Conference, IPC 2018 - Reston, VA, USA, Reston, United States|
Duration: 30 Sep 2018 → 4 Oct 2018
|Conference||31st IEEE Photonics Conference, IPC 2018|
|Period||30/09/18 → 4/10/18|
- silicon on insulator
- hybrid integrated circuits
- nano positioning
Guilhabert, B., McPhillimy, J., Klitis, C., Dawson, M. D., Sorel, M., & Strain, M. J. (Accepted/In press). Nanoscale accurate heterogeneous integration of waveguide devices by transfer printing. In IEEE Photonics Conference 2018 IEEE.