Nanoscale accurate heterogeneous integration of waveguide devices by transfer printing

B. Guilhabert; J. McPhillimy; C. Klitis; M.D. Dawson; M. Sorel; M.J. Strain

Nanoscale accurate heterogeneous integration of waveguide devices by transfer printing

B. Guilhabert, J. McPhillimy, C. Klitis, M.D. Dawson, M. Sorel, M.J. Strain

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

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Abstract

The vertical micro-assembly of membrane photonic devices across a range of materials is presented, including polymers, silicon and III-V semiconductors. Fully-fabricated waveguide structures are integrated with sub-100nm absolute placement accuracy. Light-emitting diodes, silicon photonics and nanowire lasers are examples of the deployment of this technique.

Original language	English
Title of host publication	IEEE Photonics Conference 2018
Place of Publication	Piscataway, NJ
Publisher	IEEE
Number of pages	3
Publication status	Accepted/In press - 17 Jul 2018
Event	31st IEEE Photonics Conference, IPC 2018 - Reston, VA, USA, Reston, United States Duration: 30 Sep 2018 → 4 Oct 2018

Conference

Conference	31st IEEE Photonics Conference, IPC 2018
Country	United States
City	Reston
Period	30/09/18 → 4/10/18

Keywords

silicon on insulator
hybrid integrated circuits
nano positioning

Access to Document

Guilhabert-etal-IEEE-PC-2018-Nanoscale-accurate-heterogeneous-integration-of-waveguide-devicesAccepted author manuscript, 270 KB

https://ieee-ipc.org/

Cite this

Guilhabert, B., McPhillimy, J., Klitis, C., Dawson, M. D., Sorel, M., & Strain, M. J. (Accepted/In press). Nanoscale accurate heterogeneous integration of waveguide devices by transfer printing. In IEEE Photonics Conference 2018 IEEE.

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AU - Strain, M.J.

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