Nanolithography: written with light

Aaron Hernandez-Santana; Duncan Graham

doi:10.1038/nnano.2010.179

Nanolithography: written with light

Aaron Hernandez-Santana, Duncan Graham

Pure And Applied Chemistry

Research output: Contribution to journal › Comment/debate › peer-review

1 Citation (Scopus)

Abstract

An array of polymer tips that can channel light to an underlying substrate can be used to generate intricate nanostructures with high throughput and over large areas.

Original language	English
Pages (from-to)	629-630
Number of pages	2
Journal	Nature Nanotechnology
Volume	5
Issue number	9
DOIs	https://doi.org/10.1038/nnano.2010.179
Publication status	Published - Sept 2010

Keywords

polymer pen lithography
nanolithography

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10.1038/nnano.2010.179

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title = "Nanolithography: written with light",

abstract = "An array of polymer tips that can channel light to an underlying substrate can be used to generate intricate nanostructures with high throughput and over large areas.",

keywords = "polymer pen lithography, nanolithography",

author = "Aaron Hernandez-Santana and Duncan Graham",

year = "2010",

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doi = "10.1038/nnano.2010.179",

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pages = "629--630",

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KW - nanolithography

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M3 - Comment/debate

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VL - 5

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EP - 630

JO - Nature Nanotechnology

JF - Nature Nanotechnology

IS - 9

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Nanolithography: written with light

Abstract

Keywords

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