Nanolithography: written with light

Aaron Hernandez-Santana; Duncan Graham

doi:10.1038/nnano.2010.179

Nanolithography: written with light

Aaron Hernandez-Santana, Duncan Graham

Pure And Applied Chemistry

Research output: Contribution to journal › Comment/debate › peer-review

1 Citation (Scopus)

Abstract

An array of polymer tips that can channel light to an underlying substrate can be used to generate intricate nanostructures with high throughput and over large areas.

Original language	English
Pages (from-to)	629-630
Number of pages	2
Journal	Nature Nanotechnology
Volume	5
Issue number	9
DOIs	https://doi.org/10.1038/nnano.2010.179
Publication status	Published - Sept 2010

Keywords

polymer pen lithography
nanolithography

Access to Document

10.1038/nnano.2010.179

Cite this

@article{b0f727b76f5a452cb023a4922d7b4ef8,

title = "Nanolithography: written with light",

abstract = "An array of polymer tips that can channel light to an underlying substrate can be used to generate intricate nanostructures with high throughput and over large areas.",

keywords = "polymer pen lithography, nanolithography",

author = "Aaron Hernandez-Santana and Duncan Graham",

year = "2010",

month = sep,

doi = "10.1038/nnano.2010.179",

language = "English",

volume = "5",

pages = "629--630",

journal = "Nature Nanotechnology",

issn = "1748-3387",

number = "9",

}

TY - JOUR

T1 - Nanolithography: written with light

AU - Hernandez-Santana, Aaron

AU - Graham, Duncan

PY - 2010/9

Y1 - 2010/9

N2 - An array of polymer tips that can channel light to an underlying substrate can be used to generate intricate nanostructures with high throughput and over large areas.

AB - An array of polymer tips that can channel light to an underlying substrate can be used to generate intricate nanostructures with high throughput and over large areas.

KW - polymer pen lithography

KW - nanolithography

UR - http://www.scopus.com/inward/record.url?scp=77956434770&partnerID=8YFLogxK

U2 - 10.1038/nnano.2010.179

DO - 10.1038/nnano.2010.179

M3 - Comment/debate

SN - 1748-3387

VL - 5

SP - 629

EP - 630

JO - Nature Nanotechnology

JF - Nature Nanotechnology

IS - 9

ER -

Nanolithography: written with light

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this