Nanogrooving by using multi-tip diamond tools

Xichun Luo, Zhen Tong

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

This chapter introduces nano-grooving approach by using multi-tip diamond
tools to generate nanostructures such as nano-gratings/nano-grooves on large
substrates. It starts by briefing the work principle and history of this nanofabrication approach. It then introduces the machining mechanism, influences
of processing parameters, and tool wear on the machined nanostructures. It
concludes with a summary of research challenges, current research achievements,
and future research directions to systematically establish this nanofabrication
approach.
Original languageEnglish
Title of host publicationMicro and Nano Fabrication Technology
EditorsJiwang Yan
Place of PublicationCham, Switzerland
PublisherSpringer
Chapter4
Pages97-137
Number of pages41
ISBN (Print)9789811300974
DOIs
Publication statusPublished - 30 Jun 2018

Keywords

  • nano-grooving
  • multi-tip diamond tool
  • MD simulation
  • tool wear
  • surface integrity
  • structural defects

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