Nanofabrication of gallium nitride photonic crystal light-emitting diodes

A.Z Khokhar, K. Parsons, G. Hubbard, F. Rahman, D.S. MacIntyre, C. Xiong, D. Massoubre, Z. Gong, N.P. Johnson, R.M. De La Rue, I.M. Watson, E. Gu, M.D. Dawson, S.J. Abbott, M.D.B Charlton, M. Tillin

Research output: Contribution to journalArticle

19 Citations (Scopus)

Abstract

We describe a comparison of nanofabrication technologies for the fabrication of 2D photonic crystal structures on GaN/InGaN blue LEDs. Such devices exhibit enhanced brightness and the possibility of controlling the angular emission profile of emitted light. This paper describes three nano lithography techniques for patterning photonic crystal structures on the emitting faces of LEDs: direct-write electron beam lithography, hard stamp nanoimprint lithography and soft-stamp nanoimprint lithography with disposable embossing masters. In each case we describe variations on the technique as well as its advantages and disadvantages. Complete process details have been given for all three techniques. In addition, we show how high performance GaN dry etch techniques, coupled with optical process monitoring can transfer resist patterns into underlying GaN material with high fidelity.
LanguageEnglish
Pages2200-2207
Number of pages7
JournalMicroelectronic Engineering
Volume87
Issue number11
DOIs
Publication statusPublished - Nov 2010

Fingerprint

Semiconductor diodes
Nanoimprint lithography
Gallium nitride
nanofabrication
gallium nitrides
Photonic crystals
Nanotechnology
Light emitting diodes
light emitting diodes
lithography
Crystal structure
photonics
Electron beam lithography
Process monitoring
Lithography
crystals
Luminance
Fabrication
embossing
crystal structure

Keywords

  • light-emitting diodes
  • photonic crystals
  • nanolithography
  • GaN dry-etching

Cite this

Khokhar, A. Z., Parsons, K., Hubbard, G., Rahman, F., MacIntyre, D. S., Xiong, C., ... Tillin, M. (2010). Nanofabrication of gallium nitride photonic crystal light-emitting diodes. Microelectronic Engineering, 87(11), 2200-2207. https://doi.org/10.1016/j.mee.2010.02.003
Khokhar, A.Z ; Parsons, K. ; Hubbard, G. ; Rahman, F. ; MacIntyre, D.S. ; Xiong, C. ; Massoubre, D. ; Gong, Z. ; Johnson, N.P. ; De La Rue, R.M. ; Watson, I.M. ; Gu, E. ; Dawson, M.D. ; Abbott, S.J. ; Charlton, M.D.B ; Tillin, M. / Nanofabrication of gallium nitride photonic crystal light-emitting diodes. In: Microelectronic Engineering. 2010 ; Vol. 87, No. 11. pp. 2200-2207.
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Khokhar, AZ, Parsons, K, Hubbard, G, Rahman, F, MacIntyre, DS, Xiong, C, Massoubre, D, Gong, Z, Johnson, NP, De La Rue, RM, Watson, IM, Gu, E, Dawson, MD, Abbott, SJ, Charlton, MDB & Tillin, M 2010, 'Nanofabrication of gallium nitride photonic crystal light-emitting diodes' Microelectronic Engineering, vol. 87, no. 11, pp. 2200-2207. https://doi.org/10.1016/j.mee.2010.02.003

Nanofabrication of gallium nitride photonic crystal light-emitting diodes. / Khokhar, A.Z; Parsons, K.; Hubbard, G.; Rahman, F.; MacIntyre, D.S.; Xiong, C.; Massoubre, D.; Gong, Z.; Johnson, N.P.; De La Rue, R.M.; Watson, I.M.; Gu, E.; Dawson, M.D.; Abbott, S.J.; Charlton, M.D.B; Tillin, M.

In: Microelectronic Engineering, Vol. 87, No. 11, 11.2010, p. 2200-2207.

Research output: Contribution to journalArticle

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AU - Hubbard, G.

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AU - Xiong, C.

AU - Massoubre, D.

AU - Gong, Z.

AU - Johnson, N.P.

AU - De La Rue, R.M.

AU - Watson, I.M.

AU - Gu, E.

AU - Dawson, M.D.

AU - Abbott, S.J.

AU - Charlton, M.D.B

AU - Tillin, M.

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Khokhar AZ, Parsons K, Hubbard G, Rahman F, MacIntyre DS, Xiong C et al. Nanofabrication of gallium nitride photonic crystal light-emitting diodes. Microelectronic Engineering. 2010 Nov;87(11):2200-2207. https://doi.org/10.1016/j.mee.2010.02.003