Nanofabricated solid immersion lenses registered to single emitters in diamond

L Marseglia, JP Hadden, AC Stanley-Clarke, JP Harrison, B Patton, Y-LD Ho, B Naydenov, F Jelezko, J Meijer, PR Dolan, J.M. Smith, J. G. Rarity, J. L. O’Brien

Research output: Contribution to journalArticle

54 Citations (Scopus)

Abstract

We describe a technique for fabricating micro- and nanostructures incorporating fluorescent defects in diamond with a positional accuracy better than hundreds of nanometers. Using confocal fluorescence microscopy and focused ion beametching, we initially locate a suitable defect with respect to registration marks on the diamondsurface then etch a structure using these coordinates. We demonstrate the technique by etching an 8 μm diameter hemisphere positioned with single negatively charged nitrogen-vacancy defect lies at its origin. Direct comparison of the fluorescencephoton count rate before and after fabrication shows an eightfold increase due to the presence of the hemisphere.
LanguageEnglish
Pages133107
Number of pages3
JournalApplied Physics Letters
Volume98
DOIs
Publication statusPublished - 30 Mar 2011

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submerging
emitters
diamonds
lenses
hemispheres
defects
etching
microscopy
nitrogen
fluorescence
microstructure
fabrication
ions

Keywords

  • solid immersion lenses
  • nanofabrication
  • confocal fluorescence microscopy
  • focused ion beam (FIB) etching

Cite this

Marseglia, L., Hadden, JP., Stanley-Clarke, AC., Harrison, JP., Patton, B., Ho, Y-LD., ... O’Brien, J. L. (2011). Nanofabricated solid immersion lenses registered to single emitters in diamond. Applied Physics Letters, 98, 133107. https://doi.org/10.1063/1.3573870
Marseglia, L ; Hadden, JP ; Stanley-Clarke, AC ; Harrison, JP ; Patton, B ; Ho, Y-LD ; Naydenov, B ; Jelezko, F ; Meijer, J ; Dolan, PR ; Smith, J.M. ; Rarity, J. G. ; O’Brien, J. L. / Nanofabricated solid immersion lenses registered to single emitters in diamond. In: Applied Physics Letters. 2011 ; Vol. 98. pp. 133107.
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Marseglia, L, Hadden, JP, Stanley-Clarke, AC, Harrison, JP, Patton, B, Ho, Y-LD, Naydenov, B, Jelezko, F, Meijer, J, Dolan, PR, Smith, JM, Rarity, JG & O’Brien, JL 2011, 'Nanofabricated solid immersion lenses registered to single emitters in diamond' Applied Physics Letters, vol. 98, pp. 133107. https://doi.org/10.1063/1.3573870

Nanofabricated solid immersion lenses registered to single emitters in diamond. / Marseglia, L; Hadden, JP; Stanley-Clarke, AC; Harrison, JP; Patton, B; Ho, Y-LD; Naydenov, B; Jelezko, F; Meijer, J; Dolan, PR; Smith, J.M.; Rarity, J. G.; O’Brien, J. L.

In: Applied Physics Letters, Vol. 98, 30.03.2011, p. 133107.

Research output: Contribution to journalArticle

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T1 - Nanofabricated solid immersion lenses registered to single emitters in diamond

AU - Marseglia, L

AU - Hadden, JP

AU - Stanley-Clarke, AC

AU - Harrison, JP

AU - Patton, B

AU - Ho, Y-LD

AU - Naydenov, B

AU - Jelezko, F

AU - Meijer, J

AU - Dolan, PR

AU - Smith, J.M.

AU - Rarity, J. G.

AU - O’Brien, J. L.

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N2 - We describe a technique for fabricating micro- and nanostructures incorporating fluorescent defects in diamond with a positional accuracy better than hundreds of nanometers. Using confocal fluorescence microscopy and focused ion beametching, we initially locate a suitable defect with respect to registration marks on the diamondsurface then etch a structure using these coordinates. We demonstrate the technique by etching an 8 μm diameter hemisphere positioned with single negatively charged nitrogen-vacancy defect lies at its origin. Direct comparison of the fluorescencephoton count rate before and after fabrication shows an eightfold increase due to the presence of the hemisphere.

AB - We describe a technique for fabricating micro- and nanostructures incorporating fluorescent defects in diamond with a positional accuracy better than hundreds of nanometers. Using confocal fluorescence microscopy and focused ion beametching, we initially locate a suitable defect with respect to registration marks on the diamondsurface then etch a structure using these coordinates. We demonstrate the technique by etching an 8 μm diameter hemisphere positioned with single negatively charged nitrogen-vacancy defect lies at its origin. Direct comparison of the fluorescencephoton count rate before and after fabrication shows an eightfold increase due to the presence of the hemisphere.

KW - solid immersion lenses

KW - nanofabrication

KW - confocal fluorescence microscopy

KW - focused ion beam (FIB) etching

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Marseglia L, Hadden JP, Stanley-Clarke AC, Harrison JP, Patton B, Ho Y-LD et al. Nanofabricated solid immersion lenses registered to single emitters in diamond. Applied Physics Letters. 2011 Mar 30;98:133107. https://doi.org/10.1063/1.3573870