Nanofabricated solid immersion lenses registered to single emitters in diamond

L Marseglia; JP Hadden; AC Stanley-Clarke; JP Harrison; B Patton; Y-LD Ho; B Naydenov; F Jelezko; J Meijer; PR Dolan; J.M. Smith; J. G. Rarity; J. L. O’Brien

doi:10.1063/1.3573870

Nanofabricated solid immersion lenses registered to single emitters in diamond

L Marseglia, JP Hadden, AC Stanley-Clarke, JP Harrison, B Patton, Y-LD Ho, B Naydenov, F Jelezko, J Meijer, PR Dolan, J.M. Smith, J. G. Rarity, J. L. O’Brien

Physics

Research output: Contribution to journal › Article › peer-review

102 Citations (Scopus)

Abstract

We describe a technique for fabricating micro- and nanostructures incorporating fluorescent defects in diamond with a positional accuracy better than hundreds of nanometers. Using confocal fluorescence microscopy and focused ion beametching, we initially locate a suitable defect with respect to registration marks on the diamondsurface then etch a structure using these coordinates. We demonstrate the technique by etching an 8 μm diameter hemisphere positioned with single negatively charged nitrogen-vacancy defect lies at its origin. Direct comparison of the fluorescencephoton count rate before and after fabrication shows an eightfold increase due to the presence of the hemisphere.

Original language	English
Pages (from-to)	133107
Number of pages	3
Journal	Applied Physics Letters
Volume	98
DOIs	https://doi.org/10.1063/1.3573870
Publication status	Published - 30 Mar 2011

Keywords

solid immersion lenses
nanofabrication
confocal fluorescence microscopy
focused ion beam (FIB) etching

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10.1063/1.3573870

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title = "Nanofabricated solid immersion lenses registered to single emitters in diamond",

abstract = "We describe a technique for fabricating micro- and nanostructures incorporating fluorescent defects in diamond with a positional accuracy better than hundreds of nanometers. Using confocal fluorescence microscopy and focused ion beametching, we initially locate a suitable defect with respect to registration marks on the diamondsurface then etch a structure using these coordinates. We demonstrate the technique by etching an 8 μm diameter hemisphere positioned with single negatively charged nitrogen-vacancy defect lies at its origin. Direct comparison of the fluorescencephoton count rate before and after fabrication shows an eightfold increase due to the presence of the hemisphere.",

keywords = "solid immersion lenses, nanofabrication, confocal fluorescence microscopy, focused ion beam (FIB) etching",

author = "L Marseglia and JP Hadden and AC Stanley-Clarke and JP Harrison and B Patton and Y-LD Ho and B Naydenov and F Jelezko and J Meijer and PR Dolan and J.M. Smith and Rarity, {J. G.} and O{\textquoteright}Brien, {J. L.}",

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day = "30",

doi = "10.1063/1.3573870",

language = "English",

volume = "98",

pages = "133107",

journal = "Applied Physics Letters",

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TY - JOUR

T1 - Nanofabricated solid immersion lenses registered to single emitters in diamond

AU - Marseglia, L

AU - Hadden, JP

AU - Stanley-Clarke, AC

AU - Harrison, JP

AU - Patton, B

AU - Ho, Y-LD

AU - Naydenov, B

AU - Jelezko, F

AU - Meijer, J

AU - Dolan, PR

AU - Smith, J.M.

AU - Rarity, J. G.

AU - O’Brien, J. L.

PY - 2011/3/30

Y1 - 2011/3/30

N2 - We describe a technique for fabricating micro- and nanostructures incorporating fluorescent defects in diamond with a positional accuracy better than hundreds of nanometers. Using confocal fluorescence microscopy and focused ion beametching, we initially locate a suitable defect with respect to registration marks on the diamondsurface then etch a structure using these coordinates. We demonstrate the technique by etching an 8 μm diameter hemisphere positioned with single negatively charged nitrogen-vacancy defect lies at its origin. Direct comparison of the fluorescencephoton count rate before and after fabrication shows an eightfold increase due to the presence of the hemisphere.

AB - We describe a technique for fabricating micro- and nanostructures incorporating fluorescent defects in diamond with a positional accuracy better than hundreds of nanometers. Using confocal fluorescence microscopy and focused ion beametching, we initially locate a suitable defect with respect to registration marks on the diamondsurface then etch a structure using these coordinates. We demonstrate the technique by etching an 8 μm diameter hemisphere positioned with single negatively charged nitrogen-vacancy defect lies at its origin. Direct comparison of the fluorescencephoton count rate before and after fabrication shows an eightfold increase due to the presence of the hemisphere.

KW - solid immersion lenses

KW - nanofabrication

KW - confocal fluorescence microscopy

KW - focused ion beam (FIB) etching

U2 - 10.1063/1.3573870

DO - 10.1063/1.3573870

M3 - Article

SN - 0003-6951

VL - 98

SP - 133107

JO - Applied Physics Letters

JF - Applied Physics Letters

ER -

Nanofabricated solid immersion lenses registered to single emitters in diamond

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Keywords

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