Nanofabricated solid immersion lenses registered to single emitters in diamond

L Marseglia, JP Hadden, AC Stanley-Clarke, JP Harrison, B Patton, Y-LD Ho, B Naydenov, F Jelezko, J Meijer, PR Dolan, J.M. Smith, J. G. Rarity, J. L. O’Brien

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Abstract

We describe a technique for fabricating micro- and nanostructures incorporating fluorescent defects in diamond with a positional accuracy better than hundreds of nanometers. Using confocal fluorescence microscopy and focused ion beametching, we initially locate a suitable defect with respect to registration marks on the diamondsurface then etch a structure using these coordinates. We demonstrate the technique by etching an 8 μm diameter hemisphere positioned with single negatively charged nitrogen-vacancy defect lies at its origin. Direct comparison of the fluorescencephoton count rate before and after fabrication shows an eightfold increase due to the presence of the hemisphere.
Original languageEnglish
Pages (from-to)133107
Number of pages3
JournalApplied Physics Letters
Volume98
DOIs
Publication statusPublished - 30 Mar 2011

Keywords

  • solid immersion lenses
  • nanofabrication
  • confocal fluorescence microscopy
  • focused ion beam (FIB) etching

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