Nanocutting mechanism of 6H-SiC investigated by scanning electron microscope online observation and stress-assisted and ion implant-assisted approaches

Zongwei Xu, Lei Liu, Zhongdu He, Dongyuan Tian, Alexander Hartmaier, Junjie Zhang, Xichun Luo, Mathias Rommel, Kai Nordlund, Guoxiong Zhang, Fengzhou Fang

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Nanocutting mechanism of 6H-SiC investigated by scanning electron microscope online observation and stress-assisted and ion implant-assisted approaches'. Together they form a unique fingerprint.

Engineering & Materials Science