Nanocutting mechanism of 6H-SiC investigated by scanning electron microscope online observation and stress-assisted and ion implant-assisted approaches

Zongwei Xu, Lei Liu, Zhongdu He, Dongyuan Tian, Alexander Hartmaier, Junjie Zhang, Xichun Luo, Mathias Rommel, Kai Nordlund, Guoxiong Zhang, Fengzhou Fang

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

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Engineering & Materials Science