Nano-stepper driven optical shutter for applications in free-space micro-optics

J. Zawadzka, L. Li, A. Unamuno, D.G. Uttamchandani

Research output: Contribution to conferencePaper

Abstract

In this paper we report a simple design of a micro-optical shutter/attenuator. The standard MUMPS process was used to fabricate the device. A vertically erected, gold-coated, 200x300 mum side length micro-mirror was precisely placed between the end faces of two closely spaced optical fibers. The position of the micro-mirror with respect to the optical fiber end face was controlled by a nano-stepping motor array. Optical and mechanical tests were performed on the device. A 1.55 mum laser beam was sent along the optical fiber. When the micro-mirror was removed from the front of the fiber, the coupling efficiency between two fibers was -10 dBm. Once the micro-mirror was placed in the optical path the coupling efficiency dropped to -51.5 dBm. The best attenuation was obtained when the micro-mirror blocked the whole cross-section of the laser beam diameter. It is evident that the device can operate as a high precision fiber optic attenuator or shutter.
LanguageEnglish
Pages50-57
Number of pages7
DOIs
Publication statusPublished - Oct 2002
EventConference on MEMS/MOEMS Technologies and Applications - Shanghai, China
Duration: 17 Oct 200218 Oct 2002

Conference

ConferenceConference on MEMS/MOEMS Technologies and Applications
CountryChina
CityShanghai
Period17/10/0218/10/02

Fingerprint

shutters
optics
mirrors
attenuators
optical fibers
laser beams
stepping motors
fibers
optical paths
fiber optics
attenuation
gold
cross sections

Keywords

  • attenuator
  • nano-positioning
  • collimation
  • micro-mirror
  • nano-stepper
  • optical shutter
  • applications
  • free-space
  • micro-optics

Cite this

Zawadzka, J., Li, L., Unamuno, A., & Uttamchandani, D. G. (2002). Nano-stepper driven optical shutter for applications in free-space micro-optics. 50-57. Paper presented at Conference on MEMS/MOEMS Technologies and Applications , Shanghai, China. https://doi.org/10.1117/12.483194
Zawadzka, J. ; Li, L. ; Unamuno, A. ; Uttamchandani, D.G. / Nano-stepper driven optical shutter for applications in free-space micro-optics. Paper presented at Conference on MEMS/MOEMS Technologies and Applications , Shanghai, China.7 p.
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Zawadzka, J, Li, L, Unamuno, A & Uttamchandani, DG 2002, 'Nano-stepper driven optical shutter for applications in free-space micro-optics' Paper presented at Conference on MEMS/MOEMS Technologies and Applications , Shanghai, China, 17/10/02 - 18/10/02, pp. 50-57. https://doi.org/10.1117/12.483194

Nano-stepper driven optical shutter for applications in free-space micro-optics. / Zawadzka, J.; Li, L.; Unamuno, A.; Uttamchandani, D.G.

2002. 50-57 Paper presented at Conference on MEMS/MOEMS Technologies and Applications , Shanghai, China.

Research output: Contribution to conferencePaper

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Zawadzka J, Li L, Unamuno A, Uttamchandani DG. Nano-stepper driven optical shutter for applications in free-space micro-optics. 2002. Paper presented at Conference on MEMS/MOEMS Technologies and Applications , Shanghai, China. https://doi.org/10.1117/12.483194