Nano-stepper driven optical shutter for applications in free-space micro-optics

J. Zawadzka, L. Li, A. Unamuno, D.G. Uttamchandani

Research output: Contribution to conferencePaper


In this paper we report a simple design of a micro-optical shutter/attenuator. The standard MUMPS process was used to fabricate the device. A vertically erected, gold-coated, 200x300 mum side length micro-mirror was precisely placed between the end faces of two closely spaced optical fibers. The position of the micro-mirror with respect to the optical fiber end face was controlled by a nano-stepping motor array. Optical and mechanical tests were performed on the device. A 1.55 mum laser beam was sent along the optical fiber. When the micro-mirror was removed from the front of the fiber, the coupling efficiency between two fibers was -10 dBm. Once the micro-mirror was placed in the optical path the coupling efficiency dropped to -51.5 dBm. The best attenuation was obtained when the micro-mirror blocked the whole cross-section of the laser beam diameter. It is evident that the device can operate as a high precision fiber optic attenuator or shutter.
Original languageEnglish
Number of pages7
Publication statusPublished - Oct 2002
EventConference on MEMS/MOEMS Technologies and Applications - Shanghai, China
Duration: 17 Oct 200218 Oct 2002


ConferenceConference on MEMS/MOEMS Technologies and Applications


  • attenuator
  • nano-positioning
  • collimation
  • micro-mirror
  • nano-stepper
  • optical shutter
  • applications
  • free-space
  • micro-optics


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