Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia Ochracea

Yansheng Zhang; Ralf Bauer; James F. C. Windmill; Deepak Uttamchandani

doi:10.1109/MEMSYS.2016.7421830

Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia Ochracea

Yansheng Zhang, Ralf Bauer, James F. C. Windmill, Deepak Uttamchandani

Electronic And Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

15 Citations (Scopus)

53 Downloads (Pure)

Abstract

A multi-band piezoelectric directional MEMS microphone is demonstrated based on a bio-mimetic design inspired by the parasitoid fly Ormia ochracea, using the PiezoMUMPs multi-user foundry process. The device achieves a directional sound field response within four frequency bands, all lying below 15 kHz. It acts as a pressure gradient microphone with hyper-cardioid polar patterns in all frequency bands, with the measured mechanical sensitivity being in good agreement with acoustic-structural simulations conducted in COMSOL Multiphysics. The maximum experimentally measured acoustic sensitivity of the device is 19.7 mV/Pa, located at a frequency of 7972 Hz and sound incidence normal to the microphone membrane.

Original language	English
Title of host publication	2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
Place of Publication	Piscataway, N.J.
Publisher	IEEE
Pages	1114 - 1117
Number of pages	4
ISBN (Print)	978-1-5090-1973-1
DOIs	https://doi.org/10.1109/MEMSYS.2016.7421830
Publication status	Published - 28 Jan 2016
Event	2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Shanghai, China Duration: 24 Jan 2016 → 28 Jan 2016

Conference

Conference	2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
Country	China
City	Shanghai
Period	24/01/16 → 28/01/16

Keywords

MEMS microphone
bio-mimetic design
Ormia ochracea
pressure gradient microphone
membranes
piezoelectric transducers
micromechanical devices

Access to Document

10.1109/MEMSYS.2016.7421830

Zhang-etal-IEEEMEMS2016-multi-band-asymmetric-piezoelectric-MEMS-microphone-inspired-Ormia-OchraceaAccepted author manuscript, 843 KB

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Zhang, Y., Bauer, R., Windmill, J. F. C., & Uttamchandani, D. (2016). Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia Ochracea. In 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 1114 - 1117). Piscataway, N.J.: IEEE. https://doi.org/10.1109/MEMSYS.2016.7421830

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title = "Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia Ochracea",

abstract = "A multi-band piezoelectric directional MEMS microphone is demonstrated based on a bio-mimetic design inspired by the parasitoid fly Ormia ochracea, using the PiezoMUMPs multi-user foundry process. The device achieves a directional sound field response within four frequency bands, all lying below 15 kHz. It acts as a pressure gradient microphone with hyper-cardioid polar patterns in all frequency bands, with the measured mechanical sensitivity being in good agreement with acoustic-structural simulations conducted in COMSOL Multiphysics. The maximum experimentally measured acoustic sensitivity of the device is 19.7 mV/Pa, located at a frequency of 7972 Hz and sound incidence normal to the microphone membrane.",

keywords = "MEMS microphone, bio-mimetic design, Ormia ochracea, pressure gradient microphone, membranes, piezoelectric transducers, micromechanical devices",

author = "Yansheng Zhang and Ralf Bauer and Windmill, {James F. C.} and Deepak Uttamchandani",

note = "{\circledC} 2016 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.",

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Zhang, Y , Bauer, R , Windmill, JFC & Uttamchandani, D 2016, Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia Ochracea. in 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, Piscataway, N.J., pp. 1114 - 1117, 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), Shanghai, China, 24/01/16. https://doi.org/10.1109/MEMSYS.2016.7421830

Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia Ochracea. / Zhang, Yansheng ; Bauer, Ralf ; Windmill, James F. C.; Uttamchandani, Deepak.

2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS). Piscataway, N.J. : IEEE, 2016. p. 1114 - 1117.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

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