Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia Ochracea

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Abstract

A multi-band piezoelectric directional MEMS microphone is demonstrated based on a bio-mimetic design inspired by the parasitoid fly Ormia ochracea, using the PiezoMUMPs multi-user foundry process. The device achieves a directional sound field response within four frequency bands, all lying below 15 kHz. It acts as a pressure gradient microphone with hyper-cardioid polar patterns in all frequency bands, with the measured mechanical sensitivity being in good agreement with acoustic-structural simulations conducted in COMSOL Multiphysics. The maximum experimentally measured acoustic sensitivity of the device is 19.7 mV/Pa, located at a frequency of 7972 Hz and sound incidence normal to the microphone membrane.
Original languageEnglish
Title of host publication2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
Place of PublicationPiscataway, N.J.
PublisherIEEE
Pages1114 - 1117
Number of pages4
ISBN (Print)978-1-5090-1973-1
DOIs
Publication statusPublished - 28 Jan 2016
Event2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Shanghai, China
Duration: 24 Jan 201628 Jan 2016

Conference

Conference2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
CountryChina
CityShanghai
Period24/01/1628/01/16

Keywords

  • MEMS microphone
  • bio-mimetic design
  • Ormia ochracea
  • pressure gradient microphone
  • membranes
  • piezoelectric transducers
  • micromechanical devices

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  • Cite this

    Zhang, Y., Bauer, R., Windmill, J. F. C., & Uttamchandani, D. (2016). Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia Ochracea. In 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 1114 - 1117). Piscataway, N.J.: IEEE. https://doi.org/10.1109/MEMSYS.2016.7421830