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Abstract
A multi-band piezoelectric directional MEMS microphone is demonstrated based on a bio-mimetic design inspired by the parasitoid fly Ormia ochracea, using the PiezoMUMPs multi-user foundry process. The device achieves a directional sound field response within four frequency bands, all lying below 15 kHz. It acts as a pressure gradient microphone with hyper-cardioid polar patterns in all frequency bands, with the measured mechanical sensitivity being in good agreement with acoustic-structural simulations conducted in COMSOL Multiphysics. The maximum experimentally measured acoustic sensitivity of the device is 19.7 mV/Pa, located at a frequency of 7972 Hz and sound incidence normal to the microphone membrane.
Original language | English |
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Title of host publication | 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) |
Place of Publication | Piscataway, N.J. |
Publisher | IEEE |
Pages | 1114 - 1117 |
Number of pages | 4 |
ISBN (Print) | 978-1-5090-1973-1 |
DOIs | |
Publication status | Published - 28 Jan 2016 |
Event | 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Shanghai, China Duration: 24 Jan 2016 → 28 Jan 2016 |
Conference
Conference | 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) |
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Country | China |
City | Shanghai |
Period | 24/01/16 → 28/01/16 |
Keywords
- MEMS microphone
- bio-mimetic design
- Ormia ochracea
- pressure gradient microphone
- membranes
- piezoelectric transducers
- micromechanical devices
Fingerprint Dive into the research topics of 'Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia Ochracea'. Together they form a unique fingerprint.
Projects
- 1 Finished
Research output
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A MEMS microphone inspired by Ormia for spatial sound detection
Zhang, Y., Bauer, R., Whitmer, W. M., Jackson, J. C., Windmill, J. F. C. & Uttamchandani, D., 26 Apr 2018. 4 p.Research output: Contribution to conference › Paper › peer-review
Open AccessFile5 Citations (Scopus)62 Downloads (Pure) -
Development of a biologically inspired MEMS microphone
Zhang, Y., Bauer, R., Whitmer, W. M., Brimijoin, W. O., Uttamchandani, D., Windmill, J. F. C. & Jackson, J. C., 25 Dec 2017. 3 p.Research output: Contribution to conference › Paper › peer-review
Open AccessFile4 Citations (Scopus)57 Downloads (Pure) -
Housing influence on multi-band directional MEMS microphones inspired by Ormia ochracea
Bauer, R., Zhang, Y., Jackson, J. C., Whitmer, W. M., Brimijoin, W. O., Akeroyd, M., Uttamchandani, D. & Windmill, J. F. C., 9 Jan 2017, IEEE Sensors, 2016. Piscataway, N.J.: IEEE, 3 p.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book
Open AccessFile1 Citation (Scopus)57 Downloads (Pure)