Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia Ochracea

Yansheng Zhang; Ralf Bauer; James F. C. Windmill; Deepak Uttamchandani

doi:10.1109/MEMSYS.2016.7421830

Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia Ochracea

Yansheng Zhang, Ralf Bauer, James F. C. Windmill, Deepak Uttamchandani

Electronic And Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

18 Citations (Scopus)

59 Downloads (Pure)

Abstract

A multi-band piezoelectric directional MEMS microphone is demonstrated based on a bio-mimetic design inspired by the parasitoid fly Ormia ochracea, using the PiezoMUMPs multi-user foundry process. The device achieves a directional sound field response within four frequency bands, all lying below 15 kHz. It acts as a pressure gradient microphone with hyper-cardioid polar patterns in all frequency bands, with the measured mechanical sensitivity being in good agreement with acoustic-structural simulations conducted in COMSOL Multiphysics. The maximum experimentally measured acoustic sensitivity of the device is 19.7 mV/Pa, located at a frequency of 7972 Hz and sound incidence normal to the microphone membrane.

Original language	English
Title of host publication	2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
Place of Publication	Piscataway, N.J.
Publisher	IEEE
Pages	1114 - 1117
Number of pages	4
ISBN (Print)	978-1-5090-1973-1
DOIs	https://doi.org/10.1109/MEMSYS.2016.7421830
Publication status	Published - 28 Jan 2016
Event	2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Shanghai, China Duration: 24 Jan 2016 → 28 Jan 2016

Conference

Conference	2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
Country/Territory	China
City	Shanghai
Period	24/01/16 → 28/01/16

Keywords

MEMS microphone
bio-mimetic design
Ormia ochracea
pressure gradient microphone
membranes
piezoelectric transducers
micromechanical devices

Access to Document

10.1109/MEMSYS.2016.7421830

Zhang-etal-IEEEMEMS2016-multi-band-asymmetric-piezoelectric-MEMS-microphone-inspired-Ormia-OchraceaAccepted author manuscript, 843 KB

Cite this

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title = "Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia Ochracea",

abstract = "A multi-band piezoelectric directional MEMS microphone is demonstrated based on a bio-mimetic design inspired by the parasitoid fly Ormia ochracea, using the PiezoMUMPs multi-user foundry process. The device achieves a directional sound field response within four frequency bands, all lying below 15 kHz. It acts as a pressure gradient microphone with hyper-cardioid polar patterns in all frequency bands, with the measured mechanical sensitivity being in good agreement with acoustic-structural simulations conducted in COMSOL Multiphysics. The maximum experimentally measured acoustic sensitivity of the device is 19.7 mV/Pa, located at a frequency of 7972 Hz and sound incidence normal to the microphone membrane.",

keywords = "MEMS microphone, bio-mimetic design, Ormia ochracea, pressure gradient microphone, membranes, piezoelectric transducers, micromechanical devices",

author = "Yansheng Zhang and Ralf Bauer and Windmill, {James F. C.} and Deepak Uttamchandani",

note = "{\textcopyright} 2016 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.; 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) ; Conference date: 24-01-2016 Through 28-01-2016",

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doi = "10.1109/MEMSYS.2016.7421830",

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Zhang, Y, Bauer, R , Windmill, JFC & Uttamchandani, D 2016, Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia Ochracea. in 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, Piscataway, N.J., pp. 1114 - 1117, 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), Shanghai, China, 24/01/16. https://doi.org/10.1109/MEMSYS.2016.7421830

Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia Ochracea. / Zhang, Yansheng; Bauer, Ralf ; Windmill, James F. C.; Uttamchandani, Deepak.

2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS). Piscataway, N.J. : IEEE, 2016. p. 1114 - 1117.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

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N1 - © 2016 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

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N2 - A multi-band piezoelectric directional MEMS microphone is demonstrated based on a bio-mimetic design inspired by the parasitoid fly Ormia ochracea, using the PiezoMUMPs multi-user foundry process. The device achieves a directional sound field response within four frequency bands, all lying below 15 kHz. It acts as a pressure gradient microphone with hyper-cardioid polar patterns in all frequency bands, with the measured mechanical sensitivity being in good agreement with acoustic-structural simulations conducted in COMSOL Multiphysics. The maximum experimentally measured acoustic sensitivity of the device is 19.7 mV/Pa, located at a frequency of 7972 Hz and sound incidence normal to the microphone membrane.

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ER -

Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia Ochracea

Abstract

Conference

Keywords

Access to Document

Other files and links

Fingerprint

Novel directional microphone design for speech enhancement in complex environments

A MEMS microphone inspired by Ormia for spatial sound detection

Development of a biologically inspired MEMS microphone

Housing influence on multi-band directional MEMS microphones inspired by Ormia ochracea

Cite this

Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia Ochracea

Abstract

Conference

Keywords

Access to Document

Other files and links

Fingerprint

Projects

Novel directional microphone design for speech enhancement in complex environments

Research output

A MEMS microphone inspired by Ormia for spatial sound detection

Development of a biologically inspired MEMS microphone

Housing influence on multi-band directional MEMS microphones inspired by Ormia ochracea

Cite this