Abstract
| Language | English |
|---|---|
| Title of host publication | 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) |
| Place of Publication | Piscataway, N.J. |
| Publisher | IEEE |
| Pages | 1114 - 1117 |
| Number of pages | 4 |
| ISBN (Print) | 978-1-5090-1973-1 |
| DOIs | |
| Publication status | Published - 28 Jan 2016 |
| Event | 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Shanghai, China Duration: 24 Jan 2016 → 28 Jan 2016 |
Conference
| Conference | 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) |
|---|---|
| Country | China |
| City | Shanghai |
| Period | 24/01/16 → 28/01/16 |
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Keywords
- MEMS microphone
- bio-mimetic design
- Ormia ochracea
- pressure gradient microphone
- membranes
- piezoelectric transducers
- micromechanical devices
Cite this
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Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia Ochracea. / Zhang, Yansheng; Bauer, Ralf; Windmill, James F. C.; Uttamchandani, Deepak.
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS). Piscataway, N.J. : IEEE, 2016. p. 1114 - 1117.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book
TY - GEN
T1 - Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia Ochracea
AU - Zhang, Yansheng
AU - Bauer, Ralf
AU - Windmill, James F. C.
AU - Uttamchandani, Deepak
N1 - © 2016 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
PY - 2016/1/28
Y1 - 2016/1/28
N2 - A multi-band piezoelectric directional MEMS microphone is demonstrated based on a bio-mimetic design inspired by the parasitoid fly Ormia ochracea, using the PiezoMUMPs multi-user foundry process. The device achieves a directional sound field response within four frequency bands, all lying below 15 kHz. It acts as a pressure gradient microphone with hyper-cardioid polar patterns in all frequency bands, with the measured mechanical sensitivity being in good agreement with acoustic-structural simulations conducted in COMSOL Multiphysics. The maximum experimentally measured acoustic sensitivity of the device is 19.7 mV/Pa, located at a frequency of 7972 Hz and sound incidence normal to the microphone membrane.
AB - A multi-band piezoelectric directional MEMS microphone is demonstrated based on a bio-mimetic design inspired by the parasitoid fly Ormia ochracea, using the PiezoMUMPs multi-user foundry process. The device achieves a directional sound field response within four frequency bands, all lying below 15 kHz. It acts as a pressure gradient microphone with hyper-cardioid polar patterns in all frequency bands, with the measured mechanical sensitivity being in good agreement with acoustic-structural simulations conducted in COMSOL Multiphysics. The maximum experimentally measured acoustic sensitivity of the device is 19.7 mV/Pa, located at a frequency of 7972 Hz and sound incidence normal to the microphone membrane.
KW - MEMS microphone
KW - bio-mimetic design
KW - Ormia ochracea
KW - pressure gradient microphone
KW - membranes
KW - piezoelectric transducers
KW - micromechanical devices
UR - http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=7411154
U2 - 10.1109/MEMSYS.2016.7421830
DO - 10.1109/MEMSYS.2016.7421830
M3 - Conference contribution book
SN - 978-1-5090-1973-1
SP - 1114
EP - 1117
BT - 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
PB - IEEE
CY - Piscataway, N.J.
ER -