Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia Ochracea

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

15 Citations (Scopus)

Abstract

A multi-band piezoelectric directional MEMS microphone is demonstrated based on a bio-mimetic design inspired by the parasitoid fly Ormia ochracea, using the PiezoMUMPs multi-user foundry process. The device achieves a directional sound field response within four frequency bands, all lying below 15 kHz. It acts as a pressure gradient microphone with hyper-cardioid polar patterns in all frequency bands, with the measured mechanical sensitivity being in good agreement with acoustic-structural simulations conducted in COMSOL Multiphysics. The maximum experimentally measured acoustic sensitivity of the device is 19.7 mV/Pa, located at a frequency of 7972 Hz and sound incidence normal to the microphone membrane.
LanguageEnglish
Title of host publication2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
Place of PublicationPiscataway, N.J.
PublisherIEEE
Pages1114 - 1117
Number of pages4
ISBN (Print)978-1-5090-1973-1
DOIs
Publication statusPublished - 28 Jan 2016
Event2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Shanghai, China
Duration: 24 Jan 201628 Jan 2016

Conference

Conference2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
CountryChina
CityShanghai
Period24/01/1628/01/16

Fingerprint

Microphones
MEMS
Frequency bands
Acoustics
Acoustic fields
Foundries
Pressure gradient
Acoustic waves
Membranes

Keywords

  • MEMS microphone
  • bio-mimetic design
  • Ormia ochracea
  • pressure gradient microphone
  • membranes
  • piezoelectric transducers
  • micromechanical devices

Cite this

Zhang, Y., Bauer, R., Windmill, J. F. C., & Uttamchandani, D. (2016). Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia Ochracea. In 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 1114 - 1117). Piscataway, N.J.: IEEE. https://doi.org/10.1109/MEMSYS.2016.7421830
Zhang, Yansheng ; Bauer, Ralf ; Windmill, James F. C. ; Uttamchandani, Deepak. / Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia Ochracea. 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS). Piscataway, N.J. : IEEE, 2016. pp. 1114 - 1117
@inproceedings{f05bcc0dd23f43f1bed0ef6501180285,
title = "Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia Ochracea",
abstract = "A multi-band piezoelectric directional MEMS microphone is demonstrated based on a bio-mimetic design inspired by the parasitoid fly Ormia ochracea, using the PiezoMUMPs multi-user foundry process. The device achieves a directional sound field response within four frequency bands, all lying below 15 kHz. It acts as a pressure gradient microphone with hyper-cardioid polar patterns in all frequency bands, with the measured mechanical sensitivity being in good agreement with acoustic-structural simulations conducted in COMSOL Multiphysics. The maximum experimentally measured acoustic sensitivity of the device is 19.7 mV/Pa, located at a frequency of 7972 Hz and sound incidence normal to the microphone membrane.",
keywords = "MEMS microphone, bio-mimetic design, Ormia ochracea, pressure gradient microphone, membranes, piezoelectric transducers, micromechanical devices",
author = "Yansheng Zhang and Ralf Bauer and Windmill, {James F. C.} and Deepak Uttamchandani",
note = "{\circledC} 2016 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.",
year = "2016",
month = "1",
day = "28",
doi = "10.1109/MEMSYS.2016.7421830",
language = "English",
isbn = "978-1-5090-1973-1",
pages = "1114 -- 1117",
booktitle = "2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "IEEE",

}

Zhang, Y, Bauer, R, Windmill, JFC & Uttamchandani, D 2016, Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia Ochracea. in 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, Piscataway, N.J., pp. 1114 - 1117, 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), Shanghai, China, 24/01/16. https://doi.org/10.1109/MEMSYS.2016.7421830

Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia Ochracea. / Zhang, Yansheng; Bauer, Ralf; Windmill, James F. C.; Uttamchandani, Deepak.

2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS). Piscataway, N.J. : IEEE, 2016. p. 1114 - 1117.

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

TY - GEN

T1 - Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia Ochracea

AU - Zhang, Yansheng

AU - Bauer, Ralf

AU - Windmill, James F. C.

AU - Uttamchandani, Deepak

N1 - © 2016 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

PY - 2016/1/28

Y1 - 2016/1/28

N2 - A multi-band piezoelectric directional MEMS microphone is demonstrated based on a bio-mimetic design inspired by the parasitoid fly Ormia ochracea, using the PiezoMUMPs multi-user foundry process. The device achieves a directional sound field response within four frequency bands, all lying below 15 kHz. It acts as a pressure gradient microphone with hyper-cardioid polar patterns in all frequency bands, with the measured mechanical sensitivity being in good agreement with acoustic-structural simulations conducted in COMSOL Multiphysics. The maximum experimentally measured acoustic sensitivity of the device is 19.7 mV/Pa, located at a frequency of 7972 Hz and sound incidence normal to the microphone membrane.

AB - A multi-band piezoelectric directional MEMS microphone is demonstrated based on a bio-mimetic design inspired by the parasitoid fly Ormia ochracea, using the PiezoMUMPs multi-user foundry process. The device achieves a directional sound field response within four frequency bands, all lying below 15 kHz. It acts as a pressure gradient microphone with hyper-cardioid polar patterns in all frequency bands, with the measured mechanical sensitivity being in good agreement with acoustic-structural simulations conducted in COMSOL Multiphysics. The maximum experimentally measured acoustic sensitivity of the device is 19.7 mV/Pa, located at a frequency of 7972 Hz and sound incidence normal to the microphone membrane.

KW - MEMS microphone

KW - bio-mimetic design

KW - Ormia ochracea

KW - pressure gradient microphone

KW - membranes

KW - piezoelectric transducers

KW - micromechanical devices

UR - http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=7411154

U2 - 10.1109/MEMSYS.2016.7421830

DO - 10.1109/MEMSYS.2016.7421830

M3 - Conference contribution book

SN - 978-1-5090-1973-1

SP - 1114

EP - 1117

BT - 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)

PB - IEEE

CY - Piscataway, N.J.

ER -

Zhang Y, Bauer R, Windmill JFC, Uttamchandani D. Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia Ochracea. In 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS). Piscataway, N.J.: IEEE. 2016. p. 1114 - 1117 https://doi.org/10.1109/MEMSYS.2016.7421830