Modified asymmetric micro-electrothermal actuator: analysis and experimentation

Research output: Contribution to journalArticle

18 Citations (Scopus)

Abstract

A modified design to generate large deflection and to control the peak temperature of the hot beam of a two-beam asymmetric thermal microactuator is presented. The analysis undertaken shows that when changing the dimensions of a section of the hot beam, it is possible to achieve a higher average temperature but a lower peak temperature within the hot beam. The design variables have been investigated, and theoretical results from the investigation are reported. The analysis undertaken shows the impact that the hot beam geometry has on the temperature distribution, and how this can be optimized to avoid local hot spots which lead to thermal failure. A dimensionless thermal parameter which determines the temperature distribution is introduced in the analysis. Thermo-mechanical analysis of the modified actuator is also undertaken in order to calculate the deflection of the modified actuator design. Experimental results confirm that this design achieves greater deflection than the classical asymmetric design whose deflection is limited because the temperature in the central part of the hot beam can reach such a high value that the structural material (polysilicon) experiences thermal failure, and is subsequently unusable.
Original languageEnglish
Pages (from-to)1734-1741
Number of pages7
JournalJournal of Micromechanics and Microengineering
Volume14
Issue number12
DOIs
Publication statusPublished - 2004

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Actuators
Temperature distribution
Microactuators
Temperature
Polysilicon
Geometry
Hot Temperature

Keywords

  • polysilicon
  • polycrystal actuator
  • electrothermics
  • microactuators
  • microengineering

Cite this

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title = "Modified asymmetric micro-electrothermal actuator: analysis and experimentation",
abstract = "A modified design to generate large deflection and to control the peak temperature of the hot beam of a two-beam asymmetric thermal microactuator is presented. The analysis undertaken shows that when changing the dimensions of a section of the hot beam, it is possible to achieve a higher average temperature but a lower peak temperature within the hot beam. The design variables have been investigated, and theoretical results from the investigation are reported. The analysis undertaken shows the impact that the hot beam geometry has on the temperature distribution, and how this can be optimized to avoid local hot spots which lead to thermal failure. A dimensionless thermal parameter which determines the temperature distribution is introduced in the analysis. Thermo-mechanical analysis of the modified actuator is also undertaken in order to calculate the deflection of the modified actuator design. Experimental results confirm that this design achieves greater deflection than the classical asymmetric design whose deflection is limited because the temperature in the central part of the hot beam can reach such a high value that the structural material (polysilicon) experiences thermal failure, and is subsequently unusable.",
keywords = "polysilicon, polycrystal actuator, electrothermics, microactuators, microengineering",
author = "Lijie Li and D.G. Uttamchandani",
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Modified asymmetric micro-electrothermal actuator: analysis and experimentation. / Li, Lijie; Uttamchandani, D.G.

In: Journal of Micromechanics and Microengineering, Vol. 14, No. 12, 2004, p. 1734-1741.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Modified asymmetric micro-electrothermal actuator: analysis and experimentation

AU - Li, Lijie

AU - Uttamchandani, D.G.

PY - 2004

Y1 - 2004

N2 - A modified design to generate large deflection and to control the peak temperature of the hot beam of a two-beam asymmetric thermal microactuator is presented. The analysis undertaken shows that when changing the dimensions of a section of the hot beam, it is possible to achieve a higher average temperature but a lower peak temperature within the hot beam. The design variables have been investigated, and theoretical results from the investigation are reported. The analysis undertaken shows the impact that the hot beam geometry has on the temperature distribution, and how this can be optimized to avoid local hot spots which lead to thermal failure. A dimensionless thermal parameter which determines the temperature distribution is introduced in the analysis. Thermo-mechanical analysis of the modified actuator is also undertaken in order to calculate the deflection of the modified actuator design. Experimental results confirm that this design achieves greater deflection than the classical asymmetric design whose deflection is limited because the temperature in the central part of the hot beam can reach such a high value that the structural material (polysilicon) experiences thermal failure, and is subsequently unusable.

AB - A modified design to generate large deflection and to control the peak temperature of the hot beam of a two-beam asymmetric thermal microactuator is presented. The analysis undertaken shows that when changing the dimensions of a section of the hot beam, it is possible to achieve a higher average temperature but a lower peak temperature within the hot beam. The design variables have been investigated, and theoretical results from the investigation are reported. The analysis undertaken shows the impact that the hot beam geometry has on the temperature distribution, and how this can be optimized to avoid local hot spots which lead to thermal failure. A dimensionless thermal parameter which determines the temperature distribution is introduced in the analysis. Thermo-mechanical analysis of the modified actuator is also undertaken in order to calculate the deflection of the modified actuator design. Experimental results confirm that this design achieves greater deflection than the classical asymmetric design whose deflection is limited because the temperature in the central part of the hot beam can reach such a high value that the structural material (polysilicon) experiences thermal failure, and is subsequently unusable.

KW - polysilicon

KW - polycrystal actuator

KW - electrothermics

KW - microactuators

KW - microengineering

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DO - 10.1088/0960-1317/14/12/019

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JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

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