Miniaturisation of photoacoustic sensing systems using MEMS transducer arrays and MEMS scanning mirrors

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

Abstract

A custom-built thin film aluminium nitride MEMS ultrasound transducer and its application to photoacoustic sensing is presented. The photoacoustic signal is generated using a commercial Nd:YAG laser and, for the first time, using a high
pulse repetition rate MEMS Q-switched Nd:YAG laser.
LanguageEnglish
Title of host publication2018 IEEE SENSORS
Place of PublicationPiscataway, NJ
PublisherIEEE
Pages1 - 3
Number of pages3
ISBN (Electronic)9781538647073
DOIs
Publication statusPublished - 27 Dec 2018
EventIEEE SENSORS 2018 -
Duration: 28 Oct 201831 Oct 2018

Conference

ConferenceIEEE SENSORS 2018
Period28/10/1831/10/18

Fingerprint

Photoacoustic effect
MEMS
Transducers
Scanning
Aluminum nitride
Lasers
Ultrasonics
Thin films

Keywords

  • ultrasound
  • MEMS
  • transducer
  • photoacoustics

Cite this

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title = "Miniaturisation of photoacoustic sensing systems using MEMS transducer arrays and MEMS scanning mirrors",
abstract = "A custom-built thin film aluminium nitride MEMS ultrasound transducer and its application to photoacoustic sensing is presented. The photoacoustic signal is generated using a commercial Nd:YAG laser and, for the first time, using a highpulse repetition rate MEMS Q-switched Nd:YAG laser.",
keywords = "ultrasound, MEMS, transducer, photoacoustics",
author = "Jonas Kusch and Flockhart, {Gordon M.H.} and Ralf Bauer and Deepak Uttamchandani",
note = "{\circledC} 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.",
year = "2018",
month = "12",
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doi = "10.1109/ICSENS.2018.8589899",
language = "English",
pages = "1 -- 3",
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}

Miniaturisation of photoacoustic sensing systems using MEMS transducer arrays and MEMS scanning mirrors. / Kusch, Jonas; Flockhart, Gordon M.H.; Bauer, Ralf; Uttamchandani, Deepak.

2018 IEEE SENSORS. Piscataway, NJ : IEEE, 2018. p. 1 - 3.

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

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