Miniaturisation of photoacoustic sensing systems using MEMS transducer arrays and MEMS scanning mirrors

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Abstract

A custom-built thin film aluminium nitride MEMS ultrasound transducer and its application to photoacoustic sensing is presented. The photoacoustic signal is generated using a commercial Nd:YAG laser and, for the first time, using a high
pulse repetition rate MEMS Q-switched Nd:YAG laser.
Original languageEnglish
Title of host publication2018 IEEE SENSORS
Place of PublicationPiscataway, NJ
PublisherIEEE
Pages1 - 3
Number of pages3
ISBN (Electronic)9781538647073
DOIs
Publication statusPublished - 27 Dec 2018
EventIEEE SENSORS 2018 -
Duration: 28 Oct 201831 Oct 2018

Conference

ConferenceIEEE SENSORS 2018
Period28/10/1831/10/18

Keywords

  • ultrasound
  • MEMS
  • transducer
  • photoacoustics

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