TY - GEN
T1 - Miniaturisation of photoacoustic sensing systems using MEMS transducer arrays and MEMS scanning mirrors
AU - Kusch, Jonas
AU - Flockhart, Gordon M.H.
AU - Bauer, Ralf
AU - Uttamchandani, Deepak
N1 - © 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
PY - 2018/12/27
Y1 - 2018/12/27
N2 - A custom-built thin film aluminium nitride MEMS ultrasound transducer and its application to photoacoustic sensing is presented. The photoacoustic signal is generated using a commercial Nd:YAG laser and, for the first time, using a highpulse repetition rate MEMS Q-switched Nd:YAG laser.
AB - A custom-built thin film aluminium nitride MEMS ultrasound transducer and its application to photoacoustic sensing is presented. The photoacoustic signal is generated using a commercial Nd:YAG laser and, for the first time, using a highpulse repetition rate MEMS Q-switched Nd:YAG laser.
KW - ultrasound
KW - MEMS
KW - transducer
KW - photoacoustics
UR - https://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=8572682
UR - http://ieee-sensors2018.org/
U2 - 10.1109/ICSENS.2018.8589899
DO - 10.1109/ICSENS.2018.8589899
M3 - Conference contribution book
SP - 1
EP - 3
BT - 2018 IEEE SENSORS
PB - IEEE
CY - Piscataway, NJ
T2 - IEEE SENSORS 2018
Y2 - 28 October 2018 through 31 October 2018
ER -