Abstract
This paper is about Microstructure fabrication in gallium nitride, silicon carbide and diamond. It was presented at the Institute of Physics Day Meeting on "Wide bandgap semiconductor technology" in 2003.
| Original language | English |
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| Publication status | Unpublished - 17 Sep 2003 |
| Event | Wide Bandgap Semiconductor Technology: Institute of Physics Day Meeting - London, United Kingdom Duration: 17 Sep 2003 → … |
Conference
| Conference | Wide Bandgap Semiconductor Technology: Institute of Physics Day Meeting |
|---|---|
| City | London, United Kingdom |
| Period | 17/09/03 → … |
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Keywords
- microstructure fabrication
- gallium nitride
- silicon carbide
- diamond
Cite this
Gu, E., Choi, H. W., Jeon, C. W., Rice, G. B., Liu, C., Watson, I. M., ... Martin, R. W. (2003). Microstructure fabrication in gallium nitride, silicon carbide and diamond. Paper presented at Wide Bandgap Semiconductor Technology: Institute of Physics Day Meeting, London, United Kingdom, .