Microscale automated alignment and spatial tracking through structured illumination

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Abstract

We present a tracking and alignment capability for use in mask-less lithography systems. Through the use of micropixellated light emitting diode (LED) arrays, fluorescent clusters can be identified and used as alignment markers at micrometer scale.
Original languageEnglish
Title of host publication2019 IEEE Photonics Conference (IPC)
Place of PublicationPiscataway, N.J.
PublisherIEEE
Number of pages2
ISBN (Electronic)9781728106151
ISBN (Print)9781728106151
DOIs
Publication statusPublished - 21 Nov 2019
EventIEEE Photonics Conference 2019 - San Antonio, United States
Duration: 29 Sep 20193 Oct 2019

Conference

ConferenceIEEE Photonics Conference 2019
Abbreviated titleIPC 2019
CountryUnited States
CitySan Antonio
Period29/09/193/10/19

Keywords

  • spatial tracking
  • LED arrays
  • light emitting diode

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