Microscale automated alignment and spatial tracking through structured illumination

Mark Stonehouse; Alex Blanchard; Benoit Guilhabert; Ian M. Watson; Erdan Gu; Johannes Herrnsdorf; Martin D. Dawson

doi:10.1109/IPCon.2019.8908309

Microscale automated alignment and spatial tracking through structured illumination

Mark Stonehouse, Alex Blanchard, Benoit Guilhabert, Ian M. Watson, Erdan Gu, Johannes Herrnsdorf, Martin D. Dawson

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

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Abstract

We present a tracking and alignment capability for use in mask-less lithography systems. Through the use of micropixellated light emitting diode (LED) arrays, fluorescent clusters can be identified and used as alignment markers at micrometer scale.

Original language	English
Title of host publication	2019 IEEE Photonics Conference (IPC)
Place of Publication	Piscataway, N.J.
Publisher	IEEE
Number of pages	2
ISBN (Electronic)	9781728106151
ISBN (Print)	9781728106151
DOIs	https://doi.org/10.1109/IPCon.2019.8908309
Publication status	Published - 21 Nov 2019
Event	IEEE Photonics Conference 2019 - San Antonio, United States Duration: 29 Sep 2019 → 3 Oct 2019

Conference

Conference	IEEE Photonics Conference 2019
Abbreviated title	IPC 2019
Country	United States
City	San Antonio
Period	29/09/19 → 3/10/19

Keywords

spatial tracking
LED arrays
light emitting diode

Access to Document

10.1109/IPCon.2019.8908309

Stonehouse-etal-IPC2019-Microscale-automated-alignment-and-spatial-tracking-through-structured-illuminationAccepted author manuscript, 623 KB

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2 Active

Structured illumination and digital lighting at the few-photon level (full proposal)
Herrnsdorf, J.
EPSRC (Engineering and Physical Sciences Research Council)
29/06/18 → 31/01/22
Project: Research Fellowship
Light-controlled manufacturing of semiconductor structures: a platform for next generation processing of photonic devices
Skabara, P., Dawson, M., Edwards, P., Martin, R. & Watson, I.
EPSRC (Engineering and Physical Sciences Research Council)
1/07/17 → 30/06/21
Project: Research

Data for: "Automated Alignment and Spatial Tracking Through Structured Illumination"
Stonehouse, M. (Creator), University of Strathclyde, 24 Oct 2019
DOI: 10.15129/7cf60f24-0678-4818-a017-719bb75f363c
Dataset

Cite this

@inproceedings{1fbd4b10bb544f49997bb586a55a72db,

title = "Microscale automated alignment and spatial tracking through structured illumination",

abstract = "We present a tracking and alignment capability for use in mask-less lithography systems. Through the use of micropixellated light emitting diode (LED) arrays, fluorescent clusters can be identified and used as alignment markers at micrometer scale.",

keywords = "spatial tracking, LED arrays, light emitting diode",

author = "Mark Stonehouse and Alex Blanchard and Benoit Guilhabert and Watson, {Ian M.} and Erdan Gu and Johannes Herrnsdorf and Dawson, {Martin D.}",

note = "{\textcopyright} 2019 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.; IEEE Photonics Conference 2019, IPC 2019 ; Conference date: 29-09-2019 Through 03-10-2019",

year = "2019",

month = nov,

day = "21",

doi = "10.1109/IPCon.2019.8908309",

language = "English",

isbn = "9781728106151",

booktitle = "2019 IEEE Photonics Conference (IPC)",

publisher = "IEEE",

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Microscale automated alignment and spatial tracking through structured illumination. / Stonehouse, Mark ; Blanchard, Alex ; Guilhabert, Benoit ; Watson, Ian M.; Gu, Erdan ; Herrnsdorf, Johannes ; Dawson, Martin D.

2019 IEEE Photonics Conference (IPC). Piscataway, N.J. : IEEE, 2019.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

TY - GEN

T1 - Microscale automated alignment and spatial tracking through structured illumination

AU - Stonehouse, Mark

AU - Blanchard, Alex

AU - Guilhabert, Benoit

AU - Watson, Ian M.

AU - Gu, Erdan

AU - Herrnsdorf, Johannes

AU - Dawson, Martin D.

N1 - © 2019 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

PY - 2019/11/21

Y1 - 2019/11/21

N2 - We present a tracking and alignment capability for use in mask-less lithography systems. Through the use of micropixellated light emitting diode (LED) arrays, fluorescent clusters can be identified and used as alignment markers at micrometer scale.

AB - We present a tracking and alignment capability for use in mask-less lithography systems. Through the use of micropixellated light emitting diode (LED) arrays, fluorescent clusters can be identified and used as alignment markers at micrometer scale.

KW - spatial tracking

KW - LED arrays

KW - light emitting diode

U2 - 10.1109/IPCon.2019.8908309

DO - 10.1109/IPCon.2019.8908309

M3 - Conference contribution book

SN - 9781728106151

BT - 2019 IEEE Photonics Conference (IPC)

PB - IEEE

CY - Piscataway, N.J.

T2 - IEEE Photonics Conference 2019

Y2 - 29 September 2019 through 3 October 2019

ER -

Microscale automated alignment and spatial tracking through structured illumination

Abstract

Conference

Keywords

Access to Document

Structured illumination and digital lighting at the few-photon level (full proposal)

Light-controlled manufacturing of semiconductor structures: a platform for next generation processing of photonic devices

Data for: "Automated Alignment and Spatial Tracking Through Structured Illumination"

Cite this