Projects per year
Abstract
We present a tracking and alignment capability for use in mask-less lithography systems. Through the use of micropixellated light emitting diode (LED) arrays, fluorescent clusters can be identified and used as alignment markers at micrometer scale.
Original language | English |
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Title of host publication | 2019 IEEE Photonics Conference (IPC) |
Place of Publication | Piscataway, N.J. |
Publisher | IEEE |
Number of pages | 2 |
ISBN (Electronic) | 9781728106151 |
ISBN (Print) | 9781728106151 |
DOIs | |
Publication status | Published - 21 Nov 2019 |
Event | IEEE Photonics Conference 2019 - San Antonio, United States Duration: 29 Sep 2019 → 3 Oct 2019 |
Conference
Conference | IEEE Photonics Conference 2019 |
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Abbreviated title | IPC 2019 |
Country/Territory | United States |
City | San Antonio |
Period | 29/09/19 → 3/10/19 |
Keywords
- spatial tracking
- LED arrays
- light emitting diode
Fingerprint
Dive into the research topics of 'Microscale automated alignment and spatial tracking through structured illumination'. Together they form a unique fingerprint.Projects
- 2 Finished
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Structured illumination and digital lighting at the few-photon level (full proposal)
EPSRC (Engineering and Physical Sciences Research Council)
29/06/18 → 31/01/22
Project: Research Fellowship
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Light-controlled manufacturing of semiconductor structures: a platform for next generation processing of photonic devices
Martin, R., Dawson, M., Edwards, P., Skabara, P. & Watson, I.
EPSRC (Engineering and Physical Sciences Research Council)
1/07/17 → 31/07/22
Project: Research
Datasets
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Data for: "Automated Alignment and Spatial Tracking Through Structured Illumination"
Stonehouse, M. (Creator), University of Strathclyde, 24 Oct 2019
DOI: 10.15129/7cf60f24-0678-4818-a017-719bb75f363c
Dataset