Microreflectivity studies of wavelength control in oxidised AlGaAs microcavities

R. Macaluso, F. Robert, A.C. Bryce, S. Calvez, M.D. Dawson

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Wet oxidation of GaAs/AlGaAs structures is an important technique in the processing of advanced devices such as vertical cavity surface emitting lasers (VCSELs). In one VCSEL application, the low-index and electrically-insulating AlxOy layers have been used to obtain high-reflectivity and broad bandwidth distributed Bragg reflector mirrors (DBRs). A further recent development has shown that combined lateral-vertical oxidation of intracavity AlGaAs layers can be used to tune the resonant wavelength of a semiconductor microcavity. The slow oxidation rate limits the lateral scale of practical wet oxidation to mesas structures of 50-100 m in width. Therefore post-processing assessment of spectral changes requires microreflectivity measurement capability with high spatial resolution. In the following, we describe the fabrication and assessment of microcavity structures in the 1.3 m range. The micro-reflectivity set-up consists of microscope-objective focussing of broadband light, combined with optics to relay the data to a spectrograph, and a CCD camera for alignment. This simple set-up allows the measurement of calibrated reflectivity for features down to a few 10's of m in size over a large spectral range (600-1800 nm). We present microreflectivity measurements of wide-bandwidth oxidised DBRs, and most significantly, for the first time to our knowledge, of oxidation control of the resonant wavelength of a microcavity in the 1.3 m range.
LanguageEnglish
Pages317-322
Number of pages5
JournalMaterials Science and Engineering B
Volume102
Issue number1
DOIs
Publication statusPublished - 8 Feb 2003

Fingerprint

Microcavities
aluminum gallium arsenides
Wavelength
Oxidation
oxidation
Distributed Bragg reflectors
wavelengths
Surface emitting lasers
Bragg reflectors
surface emitting lasers
reflectance
mirrors
bandwidth
Bandwidth
Laser applications
cavities
Spectrographs
laser applications
relay
mesas

Keywords

  • microreflectivity
  • optical cavity
  • wavelength-control
  • wet oxidation

Cite this

Macaluso, R. ; Robert, F. ; Bryce, A.C. ; Calvez, S. ; Dawson, M.D. / Microreflectivity studies of wavelength control in oxidised AlGaAs microcavities. In: Materials Science and Engineering B. 2003 ; Vol. 102, No. 1. pp. 317-322.
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Microreflectivity studies of wavelength control in oxidised AlGaAs microcavities. / Macaluso, R.; Robert, F.; Bryce, A.C.; Calvez, S.; Dawson, M.D.

In: Materials Science and Engineering B, Vol. 102, No. 1, 08.02.2003, p. 317-322.

Research output: Contribution to journalArticle

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