Abstract
| Language | English |
|---|---|
| Pages | 299-307 |
| Number of pages | 9 |
| Journal | Proceedings of SPIE the International Society for Optical Engineering |
| Volume | 5147 |
| DOIs | |
| Publication status | Published - 2003 |
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Keywords
- gallium nitride
- sapphire
- silicon carbide
- ultra-short pulses
- optical engineering
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Micromachining of gallium nitride, sapphire and silicon carbide using ultra-short pulses. / Rice, G.B.; Jones, D.R.; Kim, K.S.; Girkin, J.M.; Jarozynski, D.; Dawson, M.D.
In: Proceedings of SPIE the International Society for Optical Engineering, Vol. 5147, 2003, p. 299-307.Research output: Contribution to journal › Article
TY - JOUR
T1 - Micromachining of gallium nitride, sapphire and silicon carbide using ultra-short pulses
AU - Rice, G.B.
AU - Jones, D.R.
AU - Kim, K.S.
AU - Girkin, J.M.
AU - Jarozynski, D.
AU - Dawson, M.D.
N1 - Alt02 International Conference on Advanced Laser Technologies (2003)
PY - 2003
Y1 - 2003
N2 - Controlled ablation of GaN, sapphire and SiC was investigated using both nanosecond and femtosecond laser pulses. Well-defined patterns of feature size similar to 10's of microns were successfully machined by fs pulses in all materials. Nanosecond (355nm) machining was primarily successful in machining GaN. Results for the different materials and pulse duration regimes are. compared and contrasted.
AB - Controlled ablation of GaN, sapphire and SiC was investigated using both nanosecond and femtosecond laser pulses. Well-defined patterns of feature size similar to 10's of microns were successfully machined by fs pulses in all materials. Nanosecond (355nm) machining was primarily successful in machining GaN. Results for the different materials and pulse duration regimes are. compared and contrasted.
KW - gallium nitride
KW - sapphire
KW - silicon carbide
KW - ultra-short pulses
KW - optical engineering
U2 - 10.1117/12.543662
DO - 10.1117/12.543662
M3 - Article
VL - 5147
SP - 299
EP - 307
JO - Proceedings of SPIE
T2 - Proceedings of SPIE
JF - Proceedings of SPIE
SN - 0277-786X
ER -