Micromachining of a piezocomposite transducer using a copper vapour laser

R. Farlow, W. Galbraith, M. Knowles, G. Hayward

Research output: Contribution to journalArticle

35 Citations (Scopus)

Abstract

A 1-3 piezocomposite transducer with front face dimensions of 2×2 mm has been micromachined using a copper vapor laser. The device consists of PZT5A piezoceramic pillars with a 65-μm pitch suspended in a low viscosity thermosetting polymer. The kerf width is 13 μm, and the transducer thickness is 170 μm, making the device suitable for ultrasonic reception at frequencies close to 10 MHz.
LanguageEnglish
Pages639-640
Number of pages1
JournalIEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
Volume48
Issue number3
DOIs
Publication statusPublished - May 2001

Fingerprint

Micromachining
micromachining
Transducers
transducers
Vapors
vapors
Copper
copper
Lasers
lasers
ultrasonics
Ultrasonics
Viscosity
viscosity
polymers
Polymers

Keywords

  • laser beam machining
  • lead compounds
  • micromachining
  • piezoceramics
  • ultrasonic transducers

Cite this

Farlow, R. ; Galbraith, W. ; Knowles, M. ; Hayward, G. / Micromachining of a piezocomposite transducer using a copper vapour laser. In: IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control. 2001 ; Vol. 48, No. 3. pp. 639-640.
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Micromachining of a piezocomposite transducer using a copper vapour laser. / Farlow, R.; Galbraith, W.; Knowles, M.; Hayward, G.

In: IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 48, No. 3, 05.2001, p. 639-640.

Research output: Contribution to journalArticle

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