A 1-3 piezocomposite transducer with front face dimensions of 2×2 mm has been micromachined using a copper vapor laser. The device consists of PZT5A piezoceramic pillars with a 65-μm pitch suspended in a low viscosity thermosetting polymer. The kerf width is 13 μm, and the transducer thickness is 170 μm, making the device suitable for ultrasonic reception at frequencies close to 10 MHz.
|Number of pages||1|
|Journal||IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control|
|Publication status||Published - May 2001|
- laser beam machining
- lead compounds
- ultrasonic transducers