Micromachined unimorphs and bimorphs

R. Farlow, W. Galbraith, S. Kelly, G. Hayward

Research output: Contribution to conferencePaper

5 Citations (Scopus)

Abstract

A frequency doubled copper vapour laser (CVL) operating at an ultraviolet wavelength of 271nm has been used to cut miniature cantilevers in laminated composites incorporating at least one layer of the ferroelectric polymer polyvinylidene fluoride (PVDF). Devices have been fabricated from PVDF with thickness values in the range 9mum to 38mum. Laser vibrometer measurements show that the fundamental resonance frequencies of these devices correspond almost exactly with values obtained from mechanical beam theory. Ultrasonic transducers consisting of bimorph and unimorph arrays are currently being designed with the aid of a finite element model, which is not discussed.
Original languageEnglish
Pages913-916
Number of pages4
DOIs
Publication statusPublished - Oct 2001
EventIEEE International Ultrasonic Symposium - Atlanta, United States
Duration: 7 Oct 200110 Oct 2001

Conference

ConferenceIEEE International Ultrasonic Symposium
CountryUnited States
CityAtlanta
Period7/10/0110/10/01

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Keywords

  • micromachined
  • unimorphs
  • bimorphs
  • copper
  • vibrometers
  • ultrasonic transducer arrays
  • polymers
  • mechanical variables measurement
  • laser theory
  • laser modes
  • laser beam cutting
  • frequency measurement
  • ferroelectric materials

Cite this

Farlow, R., Galbraith, W., Kelly, S., & Hayward, G. (2001). Micromachined unimorphs and bimorphs. 913-916. Paper presented at IEEE International Ultrasonic Symposium , Atlanta, United States. https://doi.org/10.1109/ULTSYM.2001.991868