Micromachined components for ultrasonic transducers and scanners

R. Farlow; W. Galbraith; J.J. Puccio; G. Hayward

doi:10.1109/ULTSYM.2003.1293140

Micromachined components for ultrasonic transducers and scanners

R. Farlow, W. Galbraith, J.J. Puccio, G. Hayward

Electronic And Electrical Engineering

Research output: Contribution to conference › Paper

Abstract

Customised theoretical methods, computer models and laser micromachining techniques have been developed as tools that are currently being employed in research concerning the design and fabrication of novel ultrasonic transducers, as well as a miniature scanner driven by a particularly simple type of ultrasonic motor. All of the current work involves laser cutting, milling and drilling of piezoceramics, piezopolymers and single crystal piezoelectric materials.

Original language	English
Pages	1296-1299
Number of pages	4
DOIs	https://doi.org/10.1109/ULTSYM.2003.1293140
Publication status	Published - Oct 2003
Event	IEEE International Ultrasonics Symposium 2003 - Honolulu, United States Duration: 5 Oct 2003 → 8 Oct 2003

Conference

Conference	IEEE International Ultrasonics Symposium 2003
Country/Territory	United States
City	Honolulu
Period	5/10/03 → 8/10/03

Keywords

micromachined components
ultrasonic transducers
scanners
laser beam cutting
piezoelectric materials
optical device fabrication
optical design
milling
micromotors
micromachining
laser theory
laser modes

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10.1109/ULTSYM.2003.1293140

Cite this

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title = "Micromachined components for ultrasonic transducers and scanners",

abstract = "Customised theoretical methods, computer models and laser micromachining techniques have been developed as tools that are currently being employed in research concerning the design and fabrication of novel ultrasonic transducers, as well as a miniature scanner driven by a particularly simple type of ultrasonic motor. All of the current work involves laser cutting, milling and drilling of piezoceramics, piezopolymers and single crystal piezoelectric materials. ",

keywords = "micromachined components, ultrasonic transducers, scanners, laser beam cutting , piezoelectric materials, optical device fabrication, optical design , milling, micromotors, micromachining, laser theory, laser modes",

author = "R. Farlow and W. Galbraith and J.J. Puccio and G. Hayward",

year = "2003",

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doi = "10.1109/ULTSYM.2003.1293140",

language = "English",

pages = "1296--1299",

note = "IEEE International Ultrasonics Symposium 2003 ; Conference date: 05-10-2003 Through 08-10-2003",

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T1 - Micromachined components for ultrasonic transducers and scanners

AU - Farlow, R.

AU - Galbraith, W.

AU - Puccio, J.J.

AU - Hayward, G.

PY - 2003/10

Y1 - 2003/10

N2 - Customised theoretical methods, computer models and laser micromachining techniques have been developed as tools that are currently being employed in research concerning the design and fabrication of novel ultrasonic transducers, as well as a miniature scanner driven by a particularly simple type of ultrasonic motor. All of the current work involves laser cutting, milling and drilling of piezoceramics, piezopolymers and single crystal piezoelectric materials.

AB - Customised theoretical methods, computer models and laser micromachining techniques have been developed as tools that are currently being employed in research concerning the design and fabrication of novel ultrasonic transducers, as well as a miniature scanner driven by a particularly simple type of ultrasonic motor. All of the current work involves laser cutting, milling and drilling of piezoceramics, piezopolymers and single crystal piezoelectric materials.

KW - micromachined components

KW - ultrasonic transducers

KW - scanners

KW - laser beam cutting

KW - piezoelectric materials

KW - optical device fabrication

KW - optical design

KW - milling

KW - micromotors

KW - micromachining

KW - laser theory

KW - laser modes

UR - http://dx.doi.org/10.1109/ULTSYM.2003.1293140

U2 - 10.1109/ULTSYM.2003.1293140

DO - 10.1109/ULTSYM.2003.1293140

M3 - Paper

SP - 1296

EP - 1299

T2 - IEEE International Ultrasonics Symposium 2003

Y2 - 5 October 2003 through 8 October 2003

ER -

Micromachined components for ultrasonic transducers and scanners

Abstract

Conference

Keywords

Access to Document

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