Micromachined components for ultrasonic transducers and scanners

R. Farlow, W. Galbraith, J.J. Puccio, G. Hayward

Research output: Contribution to conferencePaper

Abstract

Customised theoretical methods, computer models and laser micromachining techniques have been developed as tools that are currently being employed in research concerning the design and fabrication of novel ultrasonic transducers, as well as a miniature scanner driven by a particularly simple type of ultrasonic motor. All of the current work involves laser cutting, milling and drilling of piezoceramics, piezopolymers and single crystal piezoelectric materials.
Original languageEnglish
Pages1296-1299
Number of pages4
DOIs
Publication statusPublished - Oct 2003
EventIEEE International Ultrasonics Symposium 2003 - Honolulu, United States
Duration: 5 Oct 20038 Oct 2003

Conference

ConferenceIEEE International Ultrasonics Symposium 2003
CountryUnited States
CityHonolulu
Period5/10/038/10/03

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Keywords

  • micromachined components
  • ultrasonic transducers
  • scanners
  • laser beam cutting
  • piezoelectric materials
  • optical device fabrication
  • optical design
  • milling
  • micromotors
  • micromachining
  • laser theory
  • laser modes

Cite this

Farlow, R., Galbraith, W., Puccio, J. J., & Hayward, G. (2003). Micromachined components for ultrasonic transducers and scanners. 1296-1299. Paper presented at IEEE International Ultrasonics Symposium 2003, Honolulu, United States. https://doi.org/10.1109/ULTSYM.2003.1293140