Micromachined components for ultrasonic transducers and scanners

R. Farlow, W. Galbraith, J.J. Puccio, G. Hayward

Research output: Contribution to conferencePaper


Customised theoretical methods, computer models and laser micromachining techniques have been developed as tools that are currently being employed in research concerning the design and fabrication of novel ultrasonic transducers, as well as a miniature scanner driven by a particularly simple type of ultrasonic motor. All of the current work involves laser cutting, milling and drilling of piezoceramics, piezopolymers and single crystal piezoelectric materials.
Original languageEnglish
Number of pages4
Publication statusPublished - Oct 2003
EventIEEE International Ultrasonics Symposium 2003 - Honolulu, United States
Duration: 5 Oct 20038 Oct 2003


ConferenceIEEE International Ultrasonics Symposium 2003
Country/TerritoryUnited States


  • micromachined components
  • ultrasonic transducers
  • scanners
  • laser beam cutting
  • piezoelectric materials
  • optical device fabrication
  • optical design
  • milling
  • micromotors
  • micromachining
  • laser theory
  • laser modes


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