Microfabrication of free-standing gallium nitride using UV laser micromachining

E. Gu; H. Howard; A. Conneely; G.M. O'Connor; P.R. Edwards; R.W. Martin; M.D. Dawson

Microfabrication of free-standing gallium nitride using UV laser micromachining

E. Gu, H. Howard, A. Conneely, G.M. O'Connor, P.R. Edwards, R.W. Martin, M.D. Dawson

Research output: Contribution to conference › Paper

Abstract

This paper is about microfabrication of free-standing gallium nitride using UV laser micromachining. It was presented at the 2005 European materials research society sprint meeting.

Original language	English
Publication status	Unpublished - 3 Jun 2005
Event	European Materials Research Society 2005 Spring Meeting - Strasbourg, France Duration: 31 May 2005 → 3 Jun 2005

Conference

Conference	European Materials Research Society 2005 Spring Meeting
City	Strasbourg, France
Period	31/05/05 → 3/06/05

Keywords

microfabrication
free-standing gallium nitride
gallium nitride
UV laser
laser micromachining
lasers

Cite this

@conference{97274c9bd08842ea8a67b6cc2f8d70d3,

title = "Microfabrication of free-standing gallium nitride using UV laser micromachining",

abstract = "This paper is about microfabrication of free-standing gallium nitride using UV laser micromachining. It was presented at the 2005 European materials research society sprint meeting.",

keywords = "microfabrication, free-standing gallium nitride, gallium nitride, UV laser, laser micromachining, lasers",

author = "E. Gu and H. Howard and A. Conneely and G.M. O'Connor and P.R. Edwards and R.W. Martin and M.D. Dawson",

note = "Also available as an article at strathprints http://strathprints.strath.ac.uk/5264/; European Materials Research Society 2005 Spring Meeting ; Conference date: 31-05-2005 Through 03-06-2005",

year = "2005",

month = jun,

day = "3",

language = "English",

}

TY - CONF

T1 - Microfabrication of free-standing gallium nitride using UV laser micromachining

AU - Gu, E.

AU - Howard, H.

AU - Conneely, A.

AU - O'Connor, G.M.

AU - Edwards, P.R.

AU - Martin, R.W.

AU - Dawson, M.D.

N1 - Also available as an article at strathprints http://strathprints.strath.ac.uk/5264/

PY - 2005/6/3

Y1 - 2005/6/3

N2 - This paper is about microfabrication of free-standing gallium nitride using UV laser micromachining. It was presented at the 2005 European materials research society sprint meeting.

AB - This paper is about microfabrication of free-standing gallium nitride using UV laser micromachining. It was presented at the 2005 European materials research society sprint meeting.

KW - microfabrication

KW - free-standing gallium nitride

KW - gallium nitride

KW - UV laser

KW - laser micromachining

KW - lasers

UR - http://www.emrs-strasbourg.com/files/pdf/2005_SPRING/program/Jmini.pdf

M3 - Paper

T2 - European Materials Research Society 2005 Spring Meeting

Y2 - 31 May 2005 through 3 June 2005

ER -

Microfabrication of free-standing gallium nitride using UV laser micromachining

Abstract

Conference

Keywords

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