Microfabrication of free-standing gallium nitride using UV laser micromachining

E. Gu, H. Howard, A. Conneely, G.M. O'Connor, P.R. Edwards, R.W. Martin, M.D. Dawson

Research output: Contribution to conferencePaper

Abstract

This paper is about microfabrication of free-standing gallium nitride using UV laser micromachining. It was presented at the 2005 European materials research society sprint meeting.
Original languageEnglish
Publication statusUnpublished - 3 Jun 2005
EventEuropean Materials Research Society 2005 Spring Meeting - Strasbourg, France
Duration: 31 May 20053 Jun 2005

Conference

ConferenceEuropean Materials Research Society 2005 Spring Meeting
CityStrasbourg, France
Period31/05/053/06/05

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Keywords

  • microfabrication
  • free-standing gallium nitride
  • gallium nitride
  • UV laser
  • laser micromachining
  • lasers

Cite this

Gu, E., Howard, H., Conneely, A., O'Connor, G. M., Edwards, P. R., Martin, R. W., & Dawson, M. D. (2005). Microfabrication of free-standing gallium nitride using UV laser micromachining. Paper presented at European Materials Research Society 2005 Spring Meeting, Strasbourg, France, .