Abstract
This paper is about microfabrication of free-standing gallium nitride using UV laser micromachining. It was presented at the 2005 European materials research society sprint meeting.
| Original language | English |
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| Publication status | Unpublished - 3 Jun 2005 |
| Event | European Materials Research Society 2005 Spring Meeting - Strasbourg, France Duration: 31 May 2005 → 3 Jun 2005 |
Conference
| Conference | European Materials Research Society 2005 Spring Meeting |
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| City | Strasbourg, France |
| Period | 31/05/05 → 3/06/05 |
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Keywords
- microfabrication
- free-standing gallium nitride
- gallium nitride
- UV laser
- laser micromachining
- lasers
Cite this
Gu, E., Howard, H., Conneely, A., O'Connor, G. M., Edwards, P. R., Martin, R. W., & Dawson, M. D. (2005). Microfabrication of free-standing gallium nitride using UV laser micromachining. Paper presented at European Materials Research Society 2005 Spring Meeting, Strasbourg, France, .