Microfabrication of free-standing gallium nitride using UV laser micromachining

E. Gu, H. Howard, A. Conneely, G.M. O'Connor, P.R. Edwards, R.W. Martin, M.D. Dawson

Research output: Contribution to conferencePaper

Abstract

This paper is about microfabrication of free-standing gallium nitride using UV laser micromachining. It was presented at the 2005 European materials research society sprint meeting.

Conference

ConferenceEuropean Materials Research Society 2005 Spring Meeting
CityStrasbourg, France
Period31/05/053/06/05

Fingerprint

laser machining
gallium nitrides
ultraviolet lasers

Keywords

  • microfabrication
  • free-standing gallium nitride
  • gallium nitride
  • UV laser
  • laser micromachining
  • lasers

Cite this

Gu, E., Howard, H., Conneely, A., O'Connor, G. M., Edwards, P. R., Martin, R. W., & Dawson, M. D. (2005). Microfabrication of free-standing gallium nitride using UV laser micromachining. Paper presented at European Materials Research Society 2005 Spring Meeting, Strasbourg, France, .
Gu, E. ; Howard, H. ; Conneely, A. ; O'Connor, G.M. ; Edwards, P.R. ; Martin, R.W. ; Dawson, M.D. / Microfabrication of free-standing gallium nitride using UV laser micromachining. Paper presented at European Materials Research Society 2005 Spring Meeting, Strasbourg, France, .
@conference{97274c9bd08842ea8a67b6cc2f8d70d3,
title = "Microfabrication of free-standing gallium nitride using UV laser micromachining",
abstract = "This paper is about microfabrication of free-standing gallium nitride using UV laser micromachining. It was presented at the 2005 European materials research society sprint meeting.",
keywords = "microfabrication, free-standing gallium nitride, gallium nitride, UV laser, laser micromachining, lasers",
author = "E. Gu and H. Howard and A. Conneely and G.M. O'Connor and P.R. Edwards and R.W. Martin and M.D. Dawson",
note = "Also available as an article at strathprints http://strathprints.strath.ac.uk/5264/; European Materials Research Society 2005 Spring Meeting ; Conference date: 31-05-2005 Through 03-06-2005",
year = "2005",
month = "6",
day = "3",
language = "English",

}

Gu, E, Howard, H, Conneely, A, O'Connor, GM, Edwards, PR, Martin, RW & Dawson, MD 2005, 'Microfabrication of free-standing gallium nitride using UV laser micromachining' Paper presented at European Materials Research Society 2005 Spring Meeting, Strasbourg, France, 31/05/05 - 3/06/05, .

Microfabrication of free-standing gallium nitride using UV laser micromachining. / Gu, E.; Howard, H.; Conneely, A.; O'Connor, G.M.; Edwards, P.R.; Martin, R.W.; Dawson, M.D.

2005. Paper presented at European Materials Research Society 2005 Spring Meeting, Strasbourg, France, .

Research output: Contribution to conferencePaper

TY - CONF

T1 - Microfabrication of free-standing gallium nitride using UV laser micromachining

AU - Gu, E.

AU - Howard, H.

AU - Conneely, A.

AU - O'Connor, G.M.

AU - Edwards, P.R.

AU - Martin, R.W.

AU - Dawson, M.D.

N1 - Also available as an article at strathprints http://strathprints.strath.ac.uk/5264/

PY - 2005/6/3

Y1 - 2005/6/3

N2 - This paper is about microfabrication of free-standing gallium nitride using UV laser micromachining. It was presented at the 2005 European materials research society sprint meeting.

AB - This paper is about microfabrication of free-standing gallium nitride using UV laser micromachining. It was presented at the 2005 European materials research society sprint meeting.

KW - microfabrication

KW - free-standing gallium nitride

KW - gallium nitride

KW - UV laser

KW - laser micromachining

KW - lasers

UR - http://www.emrs-strasbourg.com/files/pdf/2005_SPRING/program/Jmini.pdf

M3 - Paper

ER -

Gu E, Howard H, Conneely A, O'Connor GM, Edwards PR, Martin RW et al. Microfabrication of free-standing gallium nitride using UV laser micromachining. 2005. Paper presented at European Materials Research Society 2005 Spring Meeting, Strasbourg, France, .