Micro-manufacturing: research, technology outcomes and development issues

Y. Qin, A. Brockett, Y. Ma, A. Razali, J. Zhao, C. Harrison, W. Pan, X. Dai, D. Loziak

Research output: Contribution to journalArticlepeer-review

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Besides continuing effort in developing MEMS-based manufacturing techniques, latest effort in Micro-manufacturing is also in Non-MEMS-based manufacturing. Research and technological development (RTD) in this field is encouraged by the increased demand on micro-components as well as promised development in the scaling down of the traditional macro-manufacturing processes for micro-length-scale manufacturing. This paper highlights some EU funded research activities in micro/nano-manufacturing, and gives examples of the latest development in micro-manufacturing methods/techniques, process chains, hybrid-processes, manufacturing equipment and supporting technologies/device, etc., which is followed by a summary of the achievements of the EU MASMICRO project. Finally, concluding remarks are given, which raise several issues concerning further development in micro-manufacturing.
Original languageEnglish
Pages (from-to)821-837
Number of pages18
JournalInternational Journal of Advanced Manufacturing Technology
Issue number9-12
Publication statusPublished - 30 Apr 2010


  • micro-product
  • micro-manufacturing
  • manufacturing system

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