Micro-cylindrical and micro-ring lenses in CVD diamond

C.L. Lee, E. Gu, M.D. Dawson

Research output: Contribution to journalArticle

21 Citations (Scopus)

Abstract

Micro-cylindrical and micro-ring lenses have been fabricated on chemical vapour deposition (CVD) diamond using photo-resist reflow and inductively coupled plasma dry etching. The surface morphology of these micro-lenses was characterized using atomic force microscopy, revealing that they have a root-mean-squared surface roughness of less than 3 nm and a cross-sectional profile close to spherical in shape. The optical properties of the micro-lenses were characterized by a laser scanning transmission/reflection confocal microscope. The measured optical parameters are very close to the calculated values, indicating high structural and surface quality of the micro-lenses. The characteristics of these micro-lenses suggest that the approach used is suitable for fabricating complex diamond micro-optics with various functionalities.
LanguageEnglish
Pages944-948
Number of pages4
JournalDiamond and Related Materials
Volume16
Issue number4-7
DOIs
Publication statusPublished - 2007

Fingerprint

Diamond
Chemical vapor deposition
Lenses
Diamonds
diamonds
lenses
vapor deposition
rings
Microoptics
Dry etching
Plasma etching
Inductively coupled plasma
Surface properties
Surface morphology
Atomic force microscopy
surface roughness
Microscopes
Optical properties
Surface roughness
microscopes

Keywords

  • synthetic diamond
  • etching
  • surface characterization
  • optical properties
  • optics

Cite this

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Micro-cylindrical and micro-ring lenses in CVD diamond. / Lee, C.L.; Gu, E.; Dawson, M.D.

In: Diamond and Related Materials, Vol. 16, No. 4-7, 2007, p. 944-948.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Micro-cylindrical and micro-ring lenses in CVD diamond

AU - Lee, C.L.

AU - Gu, E.

AU - Dawson, M.D.

PY - 2007

Y1 - 2007

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AB - Micro-cylindrical and micro-ring lenses have been fabricated on chemical vapour deposition (CVD) diamond using photo-resist reflow and inductively coupled plasma dry etching. The surface morphology of these micro-lenses was characterized using atomic force microscopy, revealing that they have a root-mean-squared surface roughness of less than 3 nm and a cross-sectional profile close to spherical in shape. The optical properties of the micro-lenses were characterized by a laser scanning transmission/reflection confocal microscope. The measured optical parameters are very close to the calculated values, indicating high structural and surface quality of the micro-lenses. The characteristics of these micro-lenses suggest that the approach used is suitable for fabricating complex diamond micro-optics with various functionalities.

KW - synthetic diamond

KW - etching

KW - surface characterization

KW - optical properties

KW - optics

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DO - 10.1016/j.diamond.2006.11.027

M3 - Article

VL - 16

SP - 944

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JO - Diamond and Related Materials

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SN - 0925-9635

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